In the high-end optical instrument application, aspherical lenses have replaced spherical lenses and became a key component owing to the aberration correction characteristic it benefits. Though aspherical lenses truly provide multiple advantages, as long as the uncertainty and time-taking issue remain unsolved in CNC polishing process, the term “mass production” will still be far from realization. In this paper, we have developed a method based on Preston’s equation and the Hertz-Contact theorem (HCT) to construct the tool influence function (TIF), hoping to increase the convergence of the process result. We will also discuss how different tool offsets affect the polishing force against the workpiece. We firstly obtained velocity distribution between bonnet and workpiece from dynamics in polar coordinates, then applied the equivalent contacting-Young’s modulus in Hertz-Contact theorem to calculate the pressure distribution model. Subsequently, we conducted a series of experiments under IRP1000 by Zeeko Ltd. and avoided unstable outcomes caused by both machine vibration and deficient tool offset. We modified the parameters into five different feed rates while remaining the equivalent dwelling time, to create more observable features of material removed and further proved the linearity relationship between the dwell time and the removal depth. We applied LP66 as the polishing pad and fused silica as the workpiece to acquire the experiment result.
We propose 3-step fabrication procedures for aspheric surface with larger departure. First step is to generate a specific aspheric surface with SSD depth under 10μm. Next step is to remove SSD and to keep the aspheric form by using Zeeko polisher with higher MRR pad. Final step is to figure and finish the aspheric surface by using QED MRF machine. In this study, we focus on 1st step to investigate the residual depth of SSD after grinding process on fused silica. The abrasion (Aa) or grindability is one of mechanical properties of glass material. The evaluation method of abrasion or grindability is different between the manufacturers. In this study, we apply the specific grinding parameters with #400 and #800 cylindrical diamond wheel on Tongtai GT-630 5-axes machine center. The ultrasonic assisted module is combined with BBT 40 tool arbor. The specifications of the ultrasonic unit are 15 - 45 kHz in frequency range, 0.2-2.5 μm in amplitude, and 1,000 Watt in power. The cross-grinding configuration is used in this study, due to its advantages of non-sensitive cutting direction in Z-axis, high cutting capability with large tools, and low cutting force for generating large convex aspheric surface. Before inspecting the SSD of the samples, wedge polishing would be applied on the ground surface for each sample. In general, the micro cracks of SSD aren’t observed easily by optical microscope due to the micro cracks were stuffed by abrasives of slurry and removed powders of glass. Thus, the mixture solution with hydrofluoric acid (HF) and hydrochloric acid (HCl) in water is used to etch ground surface. After etching, the micro cracks of SSD can be measured by Keyence VK-9700 confocal microscope. The depth of SSD is calculated by length of SSD and wedge angle of the plane.
The poker chip assembly with high precision lens barrels is widely applied to ultra-high performance optical system. ITRC applies the poker chip assembly technology to the high numerical aperture objective lenses and lithography projection lenses because of its high efficiency assembly process. In order to achieve high precision lens cell for poker chip assembly, an alignment turning system (ATS) is developed. The ATS includes measurement, alignment and turning modules. The measurement module is equipped with a non-contact displacement sensor (NCDS) and an autocollimator (ACM). The NCDS and ACM are used to measure centration errors of the top and the bottom surface of a lens respectively; then the amount of adjustment of displacement and tilt with respect to the rotational axis of the turning machine for the alignment module can be determined. After measurement, alignment and turning processes on the ATS, the centration error of a lens cell with 200 mm in diameter can be controlled within 10 arcsec. Furthermore, a poker chip assembly lens cell with three sub-cells is demonstrated, each sub-cells are measured and accomplished with alignment and turning processes. The lens assembly test for five times by each three technicians; the average transmission centration error of assembly lens is 12.45 arcsec. The results show that ATS can achieve high assembly efficiency for precision optical systems.
The grinding process is the primary technology for curvature generation (CG) on glass optics. The higher material removal rate (MRR) leads to deeper sub-surface damage (SSD) on lens surface. The SSD must be removed by following lapping and polishing processes to ensure the lens quality. However, these are not an easy and an efficient process to remove the SSD from ground surface directly for aspheric surfaces with tens or hundreds microns departure from bestfit- sphere (BFS). An efficient fabrication procedure for large aspheric departure on glass materials must be considered. We propose 3-step fabrication procedures for aspheric surface with larger departure. 1st step is to generate a specific aspheric surface with depth less than 10 μm of SSD residual. 2nd step is to remove SSD and keep the aspheric form by using Zeeko polisher with higher MRR pad. Final step is to figure and finish the aspheric surface by using QED MRF machine. In this study, we focus on the 1st step to investigate the residual depth of SSD after grinding process on different abrasion materials. The materials of tested part are fused silica, S-NPH2, and S-PHM52. The cross grinding would be configured and depth of SSD/surface roughness would be evaluated in this study. The characteristic of SSD could be observed after etching by confocal microscope. The experimental results show the depth of SSD below 31.1 μm with #400 grinding wheel. And the near 10 μm depth of SSD would be achieved with #1,000 grinding wheel. It means the aspherization polishing on large parts with large departure from best fit sphere would be replaced. The fabrication of large aspheric part would be efficient.
Spherical lenses lead to forming spherical aberration and reduced optical performance. Consequently, in practice optical system shall apply a combination of spherical lenses for aberration correction. Thus, the volume of the optical system increased. In modern optical systems, aspherical lenses have been widely used because of their high optical performance with less optical components. However, aspherical surfaces cannot be fabricated by traditional full aperture polishing process due to their varying curvature. Sub-aperture computer numerical control (CNC) polishing is adopted for aspherical surface fabrication in recent years. By using CNC polishing process, mid-spatial frequency (MSF) error is normally accompanied during this process. And the MSF surface texture of optics decreases the optical performance for high precision optical system, especially for short-wavelength applications. Based on a bonnet polishing CNC machine, this study focuses on the relationship between MSF surface texture and CNC polishing parameters, which include feed rate, head speed, track spacing and path direction. The power spectral density (PSD) analysis is used to judge the MSF level caused by those polishing parameters. The test results show that controlling the removal depth of single polishing path, through the feed rate, and without same direction polishing path for higher total removal depth can efficiently reduce the MSF error. To verify the optical polishing parameters, we divided a correction polishing process to several polishing runs with different direction polishing paths. Compare to one shot polishing run, multi-direction path polishing plan could produce better surface quality on the optics.
In general, the drop-in and cell-mounted assembly are used for standard and high performance optical system respectively. The optical performance is limited by the residual centration error and position accuracy of the conventional assembly. Recently, the poker chip assembly with high precision lens barrels that can overcome the limitation of conventional assembly is widely applied to ultra-high performance optical system. ITRC also develops the poker chip assembly solution for high numerical aperture objective lenses and lithography projection lenses. In order to achieve high precision lens cell for poker chip assembly, an alignment turning system (ATS) is developed. The ATS includes measurement, alignment and turning modules. The measurement module including a non-contact displacement sensor and an autocollimator can measure centration errors of the top and the bottom surface of a lens respectively. The alignment module comprising tilt and translation stages can align the optical axis of the lens to the rotating axis of the vertical lathe. The key specifications of the ATS are maximum lens diameter, 400mm, and radial and axial runout of the rotary table < 2 μm. The cutting performances of the ATS are surface roughness Ra < 1 μm, flatness < 2 μm, and parallelism < 5 μm. After measurement, alignment and turning processes on our ATS, the centration error of a lens cell with 200mm in diameter can be controlled in 10 arcsec. This paper also presents the thermal expansion of the hydrostatic rotating table. A poker chip assembly lens cell with three sub-cells is accomplished with average transmission centration error in 12.45 arcsec by fresh technicians. The results show that ATS can achieve high assembly efficiency for precision optical systems.
An absolute measurement method involving a computer-generated hologram to facilitate the identification of manufacturing form errors and mounting- and gravity-induced deformations of a 300-mm aspheric mirror is proposed. In this method, the frequency and magnitude of the curve graph plotted from each Zernike coefficient obtained by rotating the mirror with various orientations about optical axis were adopted to distinguish the nonrotationally symmetric aberration. In addition, the random ball test was used to calibrate the rotationally symmetric aberration (spherical aberration). The measured absolute surface figure revealed that a highly accurate aspheric surface with a peak-to-valley value of 1/8 wave at 632.8 nm was realized after the surface figure was corrected using the reconstructed error map.
This paper presents the validation of the design of a 6-in. f/2.2 dual-wavelength transmission sphere (TS) based on the Fizeau interferometer. The TS was verified at a wavelength of 632.8 nm and is compatible for measuring the transmitted wavefront error of an i-line lithography lens. The achromatic design is imperative for a dual wavelength TS and requires more lenses for correcting the chromatic focal shift. Because the overall weight of the TS should be controlled within the load range of the piezoelectric transducers of the interferometer, the fabrication and mounting of lenses with high aspect ratios are challengeable. The mounting of the reference surface based on three-point mounting was successful for the residual reference wavefront error under peak-to-valley (PV) λ/10. Furthermore, the reference wavefront is typically restricted within PV 5λ to avoid distorted interference fringes. Therefore, we built a double-pass interferometer model for tolerance analysis, and the error budget facilitated decision-making regarding the suitable specifications of lens manufacturing and assembly for cost efficiency. The test results demonstrated that the deformation of the reference wavefront and the residual reference wavefront error met the critical specification at 632.8 nm and that the achromatic TS is compatible for measuring i-line lithography lenses.
The mounting design of a reference surface for a 6-in transmission sphere is presented in this paper. To achieve highprecision measurement in interferometry, the reference wavefront error should be controlled within peak-to-valley (PV) 0.1 λ (λ=0.6328 um) for subtraction in calibration. The reference wavefront error includes the system aberration error and the irregularity of the reference surface. When a transmission sphere is well aligned, the reference wavefront error is dominated by the reference surface. The mounting of the reference surface is imperative because the surface deformation of the reference surface after mounting needs to be lower than 0.1 λ. Besides the mounting deformation, self-weight deformation is also considerable for large optics, such as 6-in reference surface in our study. Consequently, a semikinematic mounting is applied using three small contact areas to avoid over constraint. The transmission sphere in our study is vertically tested on QED aspheric stitching interferometer (ASI), and then the trefoil aberration is occurred. There are two methods to decrease surface deformation after mounting, including deformation correction using computer control optical surfacing (CCOS) and adding soft supporting between hard mounting. In this study, three soft supports are used to share the loads of three rigid supports and then to minimize surface deformation due to gravity. Mounting design and experiments are described in this paper. Finally, the reference wavefront error of the prototype is successfully restrained within 0.1 λ in measurement.
Several mounting configurations could be applied to opto-mechanical design for achieving high precise optical system. The retaining ring mounting is simple and cost effective. However, it would deform the optics due to its unpredictable over-constraint forces. The retaining ring can be modified to three small contact areas becoming a semi-kinematic mounting. The semi-kinematic mounting can give a fully constrained in lens assembly and avoid the unpredictable surface deformation. However, there would be still a deformation due to self-weight in large optics especially in vertical setup applications. The self-weight deformation with a semi-kinematic mounting is a stable, repeatable and predictable combination of power and trefoil aberrations. This predictable deformation can be pre-compensated onto the design surface and be corrected by using CNC polisher. Thus it is a freeform surface before mounting to the lens cell. In this study, the freeform correction polishing is demonstrated in a Φ150 lens with semi-kinematic mounting. The clear aperture of the lens is Φ143 mm. We utilize ANSYS simulation software to analyze the lens deformation due to selfweight deformation with semi-kinematic mounting. The simulation results of the self-weight deformation are compared with the measurement results of the assembled lens cell using QED aspheric stitching interferometer (ASI). Then, a freeform surface of a lens with semi-kinematic mounting due to self-weight deformation is verified. This deformation would be corrected by using QED Magnetorheological Finishing (MRF® ) Q-flex 300 polishing machine. The final surface form error of the assembled lens cell after MRF figuring is 0.042 λ in peak to valley (PV).
The transmission sphere (TS) provides a high-quality reference wavefront which is common path with a test wavefront to generate interference fringes in a Fizeau interferometer. The optical path difference (OPD) of the reference wavefront should be controlled within peak-to-valley (PV) 5 λ (λ=0.6328 um), because too large OPD makes interference fringes distorted. Therefore, the tolerance analysis of the reference wavefront is very critical. Because the surface irregularity of lens can change the phase of a wavefront, surface deformation after mounting highly impacts on the wavefront error. For large optics, such as φ 6-inch in this study, surface deformation dominates the quality of the reference wavefront. For minimizing surface deformation after mounting, semi-kinematic mounting technology is used in sub-cells design to avoid over-constraint forces and unpredictable deformation. Then, the deformation due to gravity force of each surface can be constrained around PV 0.3 λ with Zernike trefoil in vertical setup TS; however, the superposition of the distorted wavefront may deteriorate the optical performance. A method of optimizing orientation of each lens around optical axis is presented in this paper. Sub-cells are designed to be rotational around optical axis respectively. The wavefront error of the reference beam of the worst case is improved significantly after optimization. Consequently, the method can effectively reduce the difficulty of lenses fabrication and mounting, and then the specification of the surface irregularity can be lower for cost saving. Based on the optimization in our study, a good reference wavefront can be acquired without any tight tolerance or complicated assembly.
The metal mirror has been widely used in optical application for a longtime. Especially the aluminum 6061 is often considered the preferred material for manufacturing optical components for ground-based astronomical applications. One reason for using this material is its high specific stiffness and excellent thermal properties. However, a large amount of data exists for this material and commercially available aluminum 6061 using single point diamond turning (SPDT) and polishing process can achieve surface roughness values of approximately 2 to 4 nm, which is adequate for applications that involve the infrared spectral range, but not for the shorter spectral range. A novel aluminum material, fabricated using a rapid solidification process that is equivalent to the conventional aluminum 6061 alloy grade has been used in optical applications in recent years because of its smaller grain size. In this study, the surface quality of the rapid solidification aluminum after single point diamond turning and followed by magnetorheological finish (MRF) process is investigated and compared with conventional aluminum 6061. Both the surface roughness Ra was evaluated using white light interferometers. Finally, indicators such as optimal fabrication parameter combination and optical performance are discussed.
This study proposes an absolute measurement method with a computer-generated hologram (CGHs) to assist the identification of manufacturing form error, and gravity and mounting resulted distortions for a 300 mm aspherical mirror. This method adopts the frequency of peaks and valleys of each Zernike coefficient grabbed by the measurement with various orientations of the mirror in horizontal optical-axis configuration. In addition, the rotational-symmetric aberration (spherical aberration) is calibrated with random ball test method. According to the measured absolute surface figure, a high accuracy aspherical surface with peak to valley (P-V) value of 1/8 wave @ 632.8 nm was fabricated after surface figure correction with the reconstructed error map.
During the fabrication of an aspherical mirror, the inspection of the residual wavefront error is critical. In the program of a spaceborne telescope development, primary mirror is made of ZERODUR with clear aperture of 450 mm. The mass is 10 kg after lightweighting. Deformation of mirror due to gravity is expected; hence uniform supporting measured by load cells has been applied to reduce the gravity effect. Inspection has been taken to determine the residual wavefront error at the configuration of mirror face upwards. Correction polishing has been performed according to the measurement. However, after comparing with the data measured by bench test while the primary mirror is at a configuration of mirror face horizontal, deviations have been found for the two measurements. Optical system that is not able to meet the requirement is predicted according to the measured wavefront error by bench test. A target wavefront error of secondary mirror is therefore analyzed to correct that of primary mirror. Optical performance accordingly is presented.
Cassegrain optical systems are widely used in remote sensing instrument. Cassegrain telescope is composed of a primary mirror (M1), a secondary mirror (M2), and a set of correction lenses. The system aberrations of telescope could be corrected and balanced by M1 and M2. In the event of deformation of telescope assembly, the non-symmetry aberrations will be induced to the optical system and reduce the optical performance. The non-symmetry aberrations can be measured after completing M1 and M2 assembly and alignment processes. Compensating this identified error to M1 or M2 can improve the optical performance of the telescope system. The error compensation on M2 is more efficient due to its smaller aperture and quickly assembly and de-assembly processes. In this study, we map the system wavefront error caused by deformation of mirror supporting and gravity onto the designed aspheric surface of M2. The surface of M2 becomes a freeform from aspheric. The polishing process combines the techniques of conventional lapping and CNC polishing. We apply the conventional spherical lapping process to quick remove the sub-surface damage (SSD) layer and to get the accurate radius of best fit sphere of the designed aspheric surface with fine surface texture simultaneously. The polishing and metrology processes were performed by using Zeeko IRP1000 polisher and QED ASI. A Φ 150 mm mirror with freeform surface was completed.
In this study, efficient polishing processes with inspection procedures for a large convex hyperbolic mirror of Cassegrain
optical system are presented. The polishing process combines the techniques of conventional lapping and CNC polishing.
We apply the conventional spherical lapping process to quickly remove the sub-surface damage (SSD) layer caused by
grinding process and to get the accurate radius of best-fit sphere (BFS) of aspheric surface with fine surface texture
simultaneously. Thus the removed material for aspherization process can be minimized and the polishing time for SSD
removal can also be reduced substantially. The inspection procedure was carried out by using phase shift interferometer
with CGH and stitching technique. To acquire the real surface form error of each sub aperture, the wavefront errors of
the reference flat and CGH flat due to gravity effect of the vertical setup are calibrated in advance. Subsequently, we
stitch 10 calibrated sub-aperture surface form errors to establish the whole irregularity of the mirror in 160 mm diameter
for correction polishing. The final result of the In this study, efficient polishing processes with inspection procedures for a large convex hyperbolic mirror of Cassegrain
optical system are presented. The polishing process combines the techniques of conventional lapping and CNC polishing.
We apply the conventional spherical lapping process to quickly remove the sub-surface damage (SSD) layer caused by
grinding process and to get the accurate radius of best-fit sphere (BFS) of aspheric surface with fine surface texture
simultaneously. Thus the removed material for aspherization process can be minimized and the polishing time for SSD
removal can also be reduced substantially. The inspection procedure was carried out by using phase shift interferometer
with CGH and stitching technique. To acquire the real surface form error of each sub aperture, the wavefront errors of
the reference flat and CGH flat due to gravity effect of the vertical setup are calibrated in advance. Subsequently, we
stitch 10 calibrated sub-aperture surface form errors to establish the whole irregularity of the mirror in 160 mm diameter
for correction polishing. The final result of the Fabrication of ф160 mm Convex Hyperbolic Mirror for Remote Sensing Instrument160 mm convex hyperbolic mirror is 0.15 μm PV and 17.9 nm RMS.160 mm convex hyperbolic mirror is 0.15 μm PV and 17.9 nm RMS.
In this study, the measurement of a 160 mm convex hyperbolic mirror by using the 6 inches phase shifting interferometer
and the CGH (computer-generated hologram) in a vertical setup is presented. The wavefront errors of the metrology
system including the reference flat and CGH flat due to gravity effect are measured and calibrated by using random
testing and null cavity testing with and without CGH. Then, the real form error of each single sub-aperture could be
acquired by subtracting the system wavefront errors. In this study, we measured form errors of 10 off-axis sub-apertures
with equal angle space and then stitched them to establish the whole irregularity in the shape of the mirror in 160 mm
diameter. Finally, we imported the irregularity in the shape of the mirror to the CNC aspheric polishing machine for
correction polishing. Combining the aspheric metrology technique and the CNC aspheric polishing technique, a 160 mm
secondary mirror for the Cassegrain reflecting system was finished within PV 0.15μm and RMS 17.9 nm.
Air-driving fluid jet polishing (FJP) technique was first presented in 2011. Slurry was drop out due to Venturi effect inside the atomizer which is the main component of air-driving FJP system, and was guided to mix with air flow by the nozzle. The Venturi effect and the added high speed air flow provide slurry more kinetic energy to impact the optical surface. Therefore, the air-driving FJP system has a rotational symmetrical Gaussian-like removal profile with lower air pressure and normal incidence configuration. In this paper, we investigate oblique incidence polishing to find the optimal material removal performance of the technique, including removal shape and depth and surface roughness. Different oblique angles ranged from 80 to 20 degree were tested. The air-driving FJP system was adapted upon a CNC machine, so not only single point polishing but also straight line polishing with constant feed rate can be carried out. We report on the performance of oblique air-driving FJP in different air pressure and processing time, and also the material removal of dynamic polishing for N-BK7, Fused Silica and ZERODUR®. The results indicate oblique incidence can get a Gaussian-like removal shape, and improve the surface roughness. The air-driving FJP not only has the advantages of conventional fluid jet polishing, such as no tool wears, cutter interference and debris deposition problems, but also has excellent material removal rate with lower energy.
In this study, we proposed an air-driving fluid jet polishing (FJP) system which draws slurry utilizing an air/water mixer.
The air-driving FJP system is mainly comprised by an air/water mixer, slurry tank with stirrer, compressed air, pressure
and flow rate regulators, and a nozzle. The high speed air flow in the air/water mixer draws out the slurry from the slurry
tank, and the slurry is guided to mix with air flow inside the nozzle cavity. Then, the combined fluid slurry is emitted
from the nozzle. The air-driving FJP system was preliminarily tested on N-BK7 and ZERODUR® plates with different
air pressure and processing time. The test results show that the air-driving system could get a Gaussian-like removal
shape with 3 kg/cm2 compressed air source and the depth of removal is about 100 nm within 5 seconds processing time.
The compressed air improves the kinetic energy of each abrasive, and makes it more efficient in material removal.
Furthermore, the Gaussian-like removal shape is more convenient for tool path planning and surface waviness control of
corrective polishing.
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