Dr. Choonghoon Oh Profile

Dr. Choonghoon Oh

Senior Scientist at Cymer LLC

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Author

Publications (6)

Proceedings Article | 11 November 2022 Presentation

Holistic imaging for yield improvements enabled by high-availability, and low-environmental impact Cymer ArFi lightsource

Siqi Luo, Will Conley, James Bonefede, Natallia Karlitskaya, Thomas Yang, david manley, peter Oh, Rajasekhar Rao, marc sells, Josh thornes

Proceedings Volume PC12293, PC122930H (2022) https://doi.org/10.1117/12.2648306

KEYWORDS: Yield improvement, Speckle, Light sources, Helium

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Proceedings Article | 6 May 2005 Paper

Development in gas-discharge drive lasers for LPP EUV sources

V. Fleurov, P. Oh, T. Steiger, I. Fomenkov, W. Partlo

Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.601037

KEYWORDS: Molybdenum, Neodymium lasers, Energy efficiency, Extreme ultraviolet, Pulsed laser operation, Laser applications, Optical amplifiers, Laser systems engineering, Oscillators, High power lasers

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Proceedings Article | 30 July 2002 Paper

Production-ready 4-kHz ArF laser for 193-nm lithography

Choonghoon Oh, Vladimir Fleurov, Thomas Hofmann, Thomas Duffey, F. Trintchouk, Patrick O'Keeffe, Peter Newman, Gerry Blumenstock

Proceedings Volume 4691, (2002) https://doi.org/10.1117/12.474567

KEYWORDS: Lithography, Argon ion lasers, Control systems, Semiconductors, Semiconducting wafers, Optical lithography, Laser applications, Reliability, Yield improvement, Energy efficiency

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Proceedings Article | 28 May 1999 Paper

Water vapor micropulse differential absorption lidar

Choonghoon Oh, Coorg Prasad, Victor Fromzel, In Hwang, John Reagan, Hui Fang, Manuel Rubio

Proceedings Volume 3707, (1999) https://doi.org/10.1117/12.351342

KEYWORDS: LIDAR, Absorption, Semiconductor lasers, Sensors, Aerosols, Receivers, Signal to noise ratio, Atmospheric modeling, Pulsed laser operation, Telescopes

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Proceedings Article | 31 December 1992 Paper

Coherent effects in forward scattering

Edward Fry, Gunasiri Padmabandu, Choonghoon Oh

Proceedings Volume 1750, (1992) https://doi.org/10.1117/12.140683

KEYWORDS: Scattering, Light scattering, Particles, Laser scattering, Crystals, Optical spheres, Sensors, Laser crystals, Ocean optics, Ferroelectric materials

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Proceedings Article | 1 March 1992 Paper

Special architecture for edge detection using the residue number system

Choonghoon Oh, Karan Watson

Proceedings Volume 1615, (1992) https://doi.org/10.1117/12.58796

KEYWORDS: Edge detection, Computer architecture, Parallel processing, Computer simulations, Clocks, Radon, Binary data, CMOS technology, Logic devices

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Showing 5 of 6 publications

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