Dr. Christiaan Baert Profile

Dr. Christiaan Baert

at imec

SPIE Involvement:

Author

Proceedings Article | 19 August 2010 Paper

Performance of a new type of module based on back-contact solar cells

Jonathan Govaerts, Jo Robbelein, Chun Gong, Bartek Pawlak, Mario Gonzalez, Ingrid De Wolf, Frederick Bossuyt, Steven Van Put, Ivan Gordon, Kris Baert, Jan Vanfleteren

Proceedings Volume 7773, 77730X (2010) https://doi.org/10.1117/12.859815

KEYWORDS: Silicon, Solar cells, Reliability, Glasses, Coating, Adhesives, Failure analysis, Crystals, Silicon solar cells, Laser drilling

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Proceedings Article | 22 January 2005 Paper

Characterization of (near) hermetic zero-level packages for MEMS

Piet De Moor, Kris Baert, Ingrid De Wolf, Anne Jourdain, Harrie Tilmans, Ann Witvrouw, Chris Van Hoof

Proceedings Volume 5716, (2005) https://doi.org/10.1117/12.596190

KEYWORDS: Microelectromechanical systems, Packaging, Sensors, Semiconducting wafers, Reliability, Resonators, Microbolometers, Liquids, Spectroscopy, Thin films

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Proceedings Article | 30 December 2003 Paper

Effect of deposition parameters on the stress gradient of CVD and PECVD poly-SiGe for MEMS applications

Tom Van der Donck, Joris Proost, Cristina Rusu, Kris Baert, Chris Van Hoof, Jean-Pierre Celis, Ann Witvrouw

Proceedings Volume 5342, (2003) https://doi.org/10.1117/12.524406

KEYWORDS: Germanium, Chemical vapor deposition, Plasma enhanced chemical vapor deposition, Transmission electron microscopy, Silicon, Plasma, Scanning electron microscopy, Profilometers, Crystals, Microelectromechanical systems

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Proceedings Article | 25 August 2000 Paper

Comparison between wet HF etching and vapor HF etching for sacrificial oxide removal

Ann Witvrouw, Bert Du Bois, Piet De Moor, Agnes Verbist, Chris Van Hoof, Hugo Bender, Christiaan Baert

Proceedings Volume 4174, (2000) https://doi.org/10.1117/12.396423

KEYWORDS: HF etching, Etching, Oxides, Vapor etching, Metals, Semiconducting wafers

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Proceedings Article | 30 August 1999 Paper

Fabrication of counter electrodes for scanning atomic probe

Andrew Campitelli, Hocine Ziad, Frank Rogge, Wilfried Vandervorst, Christiaan Baert, Min Huang, Alfred Cerezo

Proceedings Volume 3874, (1999) https://doi.org/10.1117/12.361214

KEYWORDS: Electrodes, Silicon, Metals, Dielectrics, Electroplating, Aluminum, Photoresist materials, Deep reactive ion etching, Semiconducting wafers, Chemical species

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Proceedings Article | 26 July 1999 Paper

Intrawafer CD control in state-of-the-art lithography

Ivan Pollentier, Christiaan Baert, Thomas Marschner, Kurt Ronse, Grozdan Grozev, Mario Reybrouck

Proceedings Volume 3679, (1999) https://doi.org/10.1117/12.354406

KEYWORDS: Semiconducting wafers, Critical dimension metrology, Standards development, Lithography, Chemistry, Metrology, Etching, Photoresist developing, Deep ultraviolet, Photoresist processing

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Proceedings Article | 3 June 1999 Paper

Silicon microphysiometer for high-throughput drug screening

Katarina Verhaegen, Christiaan Baert, Bob Puers, Willy Sansen, Jeannine Simaels, Veerle Van Driessche, Lou Hermans, Robert Mertens

Proceedings Volume 3606, (1999) https://doi.org/10.1117/12.350058

KEYWORDS: Sensors, Silicon, Prototyping, Biosensors, Mode conditioning cables, Temperature metrology, Calorimetry, Fabrication, Liquids, Etching

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We report on a micromachined silicon chip that is capable of providing a high-throughput functional assay based on calorimetry. A prototype twin microcalorimeter based on the Seebeck effect has been fabricated by IC technology and micromachined postprocessing techniques. A biocompatible liquid rubber membrane supports two identical 0.5 X 2 cm² measurement chambers, situated at the cold and hot junction of a 666-junction aluminum/p+-polysilicon thermopile. The chambers can house up to 10⁶ eukaryotic cells cultured to confluence. The advantage of the device over microcalorimeters on the market, is the integration of the measurement channels on chip, rendering microvolume reaction vessels, ranging from 10 to 600 (mu) l, in the closest possible contact with the thermopile sensor (no springs are needed). Power and temperature sensitivity of the sensor are 23 V/W and 130 mV/K, respectively. The small thermal inertia of the microchannels results in the short response time of 70 s, when filled with 50 (mu) l of water. Biological experiments were done with cultured kidney cells of Xenopus laevis (A6). The thermal equilibration time of the device is 45 min. Stimulation of transport mechanisms by reducing bath osmolality by 50% increased metabolism by 20%. Our results show that it is feasible to apply this large-area, small- volume whole-cell biosensor for drug discovery, where the binding assays that are commonly used to provide high- throughput need to be complemented with a functional assay. Solutions are brought onto the sensor by a simple pipette, making the use of an industrial microtiterplate dispenser feasible on a nx96-array of the microcalorimeter biosensor. Such an array of biosensors has been designed based on a new set of requirements as set forth by people in the field as this project moved on. The results obtained from the prototype large-area sensor were used to obtain an accurate model of the calorimeter, checked for by the simulation software ANSYS. At present, the sensor chip has been designed. Future publication(s) will deal with this part of the work.

Proceedings Article | 23 September 1996 Paper

Bonding techniques for single crystal TFT AMLCDs

Sonja van der Groen, Maarten Rosmeulen, Philippe Jansen, Ludo Deferm, Christiaan Baert

Proceedings Volume 2881, (1996) https://doi.org/10.1117/12.251250

KEYWORDS: Semiconducting wafers, Wafer bonding, Electrodes, Silicon, Glasses, Epoxies, Adhesives, Oxides, Capacitors, Crystals

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Proceedings Article | 17 September 1996 Paper

Design considerations of the electrical contacts in (micro)relays

Hocine Ziad, Christiaan Baert, Harrie Tilmans

Proceedings Volume 2882, (1996) https://doi.org/10.1117/12.250706

KEYWORDS: Resistance, Relays, Scatter measurement

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SPIE Journal Paper | 1 November 1994

Liquid-crystal 1.8-in. displays using poly-Si thin-film transistors with novel structure and a storage-capacitance arrangement

Takashi Sugawara, Kazuhiro Kobayashi, Hiroyuki Murai, Christiaan Baert, Takao Sakamoto, Hidetada Tokioka, Yuichi Masutani, Hirofumi Namizaki, Masahiro Nunoshita

OE, Vol. 33, Issue 11, (November 1994) https://doi.org/10.1117/12.10.1117/12.181150

KEYWORDS: Capacitance, LCDs, Electrodes, Resistance, Liquid crystals, Thin films, Transistors, Plasma, Silicon, Photoresist materials

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Proceedings Article | 13 August 1993 Paper

1.8-inch poly-Si TFT-LCDs with novel TFT structure and storage capacitance arrangement

Takashi Sugawara, Kazuhiro Kobayashi, Hiroyuki Murai, Christiaan Baert, Takao Sakamoto, Hidetada Tokioka, Yuichi Masutani, Hirofumi Namizaki, Masahiro Nunoshita

Proceedings Volume 1911, (1993) https://doi.org/10.1117/12.151214

KEYWORDS: Capacitance, Electrodes, Resistance, Silicon, Plasma, Fabrication, LCDs, Plasma etching, Etching, Crystals

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Showing 5 of 11 publications

Conference Committee Involvement (6)

Smart Sensors, Actuators and MEMS

2 May 2007 | Maspalomas, Gran Canaria, Spain

MOEMS and Miniaturized Systems VI

24 January 2007 | San Jose, California, United States

MOEMS Display, Imaging, and Miniaturized Microsystems IV

25 January 2006 | San Jose, California, United States

Smart Sensors, Actuators, and MEMS II

9 May 2005 | Sevilla, Spain

MOEMS and Miniaturized Systems V

25 January 2005 | San Jose, California, United States

Showing 5 of 6 Conference Committees

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