Asphere and freeform metrology forms the basis of precision optics fabrication. Stitching or scanning methods provide the necessary flexibility, but require measurement times of several minutes. Using parallel information channels of light (wavelength, polarization, phase) in combination with the model-based tilted wave interferometry approach boosts the measurement possibilities. In this proceeding we show how these information channels can be used to enhance the measurement capabilities regarding reconstruction quality and show how the complete shape information of strong aspheres can be recorded by TWISS (tilted wave interferometry single-shot) within milliseconds.
This investigation proposes a method for absolute surface determination in a coordinate measuring machine (CMM) with a planar extension of 200 x 200 mm² which is based on the measurement of two spatial gradient fields. The gradient field data was obtained by measuring a test mirror in two equidistant shifted positions along two orthogonal axes while the reference mirror stayed in a steady position. The comparison of experimental data measured in an area of 192 × 192 mm² showed a small root-mean-square deviation of 5.3 nm between the reconstruction result and a regular measurement result. For an a priori estimation of the influence of experimental error sources on the reconstruction deviation, simulations of the measurement process were carried out. Alongside determining the optimal measurement strategy, the focus was investigating positional and orientational deviations of the test surface caused by the shifting motions. While the translational deviations have a subordinate effect, the simulated results show that small orientation deviations around the motion axes cause high reconstruction deviations. To eliminate the motion-induced share of the gradient fields orientation a separation from the topography intrinsic share, which has to remain part of the data, is necessary. This is achieved by the combination of the high-precision design of the mechanical shifting stage and the implementation of an additional boundary condition in the data processing using a least square algorithm.
Nanometer resolution metrology is a significant topic in the development and production of complex shaped high precision optics. The Nanopositioning and Nanomeasuring Machine NPMM-200 at ITO is built for nanometer scale positioning in a large scale measurement volume of 200 mm x 200 mm x 25 mm. The concept of the machine is based on a high precision interferometrically controlled stage in a stable metrological frame made of glass-ceramic. In this frame, different types of sensors can be attached for measurement of surface topographies. In this contribution, we present the use of optical sensors, such as a fixed focus probe, for measuring of high precision aspheric and freeform optics with this new machine.
Tilted Wave Interferometry has been invented and developed over the last years as a flexible and very fast method to test precision aspheres and freeform surfaces . It measures surface deviations full field, with high lateral resolution, without any null compensator like CGH and without moving the tested part while measuring. The test of non-spherical optical components is a topic of high relevance for optics industry, as current optic designs rely heavily on those elements, since the small form factors and high performance of actual designs would be impossible with traditional spherical optics designs. As all precision components, aspheres and freeform surfaces need accurate testing for their production. Ideally, testing of components is closely integrated into the fabrication chain. Due to the high flexibility and measurement speed of the TWI of typically less than 30 sec it is well suited for this purpose. Due to the special illumination scheme, the first implementations of this new interferometer have been of Mach Zehnder type. In this contribution we demonstrate, how the tilted wave interferometer principle can be implemented in a Fizeau configuration. The benefit of this configuration against the Mach Zehnder configuration is the common path feature. Here, the reference beam and the measurement beam follow the same optical track inside the interferometer, making the interferometer much more robust against temporal environmental influences such as vibrations and air turbulences. At the same time, form tolerances of the interferometer components in the common path area can be relaxed. These advantages of Fizeau are well known. The multiple source illumination of the tilted wave interferometer however leads to the generation of multiple reference wavefronts that can be disturbing. We therefore present a new TWI implementation that avoids these problems. It relies on a new illumination design with four sets of illumination patterns that each generate their own reference wave. The new approach has been implemented in a lab setup and shows in first measurements the expected improvements in stability. We tested the system in extensive Monte Carlo simulations. The common path approach showed a reconstruction error of the test specimen of up to an order of magnitude lower compared the Mach-Zehnder configuration.
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