Christian Walk
at Fraunhofer-IMS
SPIE Involvement:
Author
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Publications (2)

Proceedings Article | 21 May 2015 Paper
Proc. SPIE. 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems
KEYWORDS: Microelectromechanical systems, Oxides, CMOS sensors, Data modeling, Sensors, Silicon, Capacitance, Low pressure chemical vapor deposition, Plasma enhanced chemical vapor deposition, Semiconducting wafers

Proceedings Article | 2 May 2012 Paper
Proc. SPIE. 8438, Photonics for Solar Energy Systems IV
KEYWORDS: Lithography, Etching, Particles, Solar cells, Silicon, Photoresist materials, Photomasks, Nanoimprint lithography, Semiconducting wafers, Absorption

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