Prof. Christian A. Zorman Profile

Prof. Christian A. Zorman

at Case Western Reserve Univ

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 12 February 2007 Paper

Development of amorphous SiC for MEMS-based microbridges

James Summers, Maximilian Scardelletti, Rocco Parro, Christian Zorman

Proceedings Volume 6464, 64640H (2007) https://doi.org/10.1117/12.704705

KEYWORDS: Silicon carbide, Etching, Semiconducting wafers, Silicon, Actuators, Plasma enhanced chemical vapor deposition, Microelectromechanical systems, Electrodes, Methane, Bridges

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Proceedings Article | 30 December 2003 Paper

Silicon carbide micro- and nanoelectromechanical systems

Mehran Mehregany, Christian Zorman

Proceedings Volume 5342, (2003) https://doi.org/10.1117/12.548920

KEYWORDS: Silicon carbide, Silicon, Semiconducting wafers, Microelectromechanical systems, Nanoelectromechanical systems, Low pressure chemical vapor deposition, Crystals, Etching, Epitaxy, Thin films

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Proceedings Article | 8 October 1999 Paper

High-temperature testing of nickel wire bonds for SiC devices

Ravi Burla, Shuvo Roy, Vishal Haria, Christian Zorman, Mehran Mehregany

Proceedings Volume 3893, (1999) https://doi.org/10.1117/12.368440

KEYWORDS: Nickel, Ultrasonics, Scanning electron microscopy, Silicon carbide, Toxic industrial chemicals, Photomicroscopy, Nitrogen, Aluminum, Annealing, Reliability

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Conference Committee Involvement (2)

MEMS/MOEMS Components and Their Applications V Special Focus Topics: Transducers at the Micro-Nano Interface

21 January 2008 | San Jose, California, United States

MEMS/MOEMS Components and Their Applications IV Special Focus Topics: Transducers at the Micro-Nano Interface

22 January 2007 | San Jose, California, United States

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