Dr. Christie R.K. Marrian
Manager, Nanoscale Structures at Spansion Inc
SPIE Involvement:
Author | Editor
Publications (17)

Proceedings Article | 24 July 2002 Paper
Proc. SPIE. 4608, Nanostructure Science, Metrology, and Technology
KEYWORDS: Semiconductors, Nanostructures, Electron beam lithography, Etching, Silicon, Inspection, Humidity, Microelectronics, Nanofabrication, Nanolithography

Proceedings Article | 25 June 1999 Paper
Proc. SPIE. 3676, Emerging Lithographic Technologies III
KEYWORDS: Lithography, Polymethylmethacrylate, Image processing, X-rays, Electrons, Scanning electron microscopy, Photomasks, X-ray imaging, X-ray lithography, Nanolithography

Proceedings Article | 27 March 1997 Paper
Proc. SPIE. 3073, Optical Pattern Recognition VIII
KEYWORDS: Fabrication, Optical components, Photodetectors, Diffraction, Optical design, Diffractive optical elements, Sensors, Image segmentation, Antennas, Phase measurement

Proceedings Article | 27 December 1996 Paper
Proc. SPIE. 2884, 16th Annual BACUS Symposium on Photomask Technology and Management
KEYWORDS: Electron beam lithography, Modulation, Sensors, Silicon, Fourier transforms, Amplifiers, Diodes, Photomasks, Raster graphics, Mask making

SPIE Journal Paper | 1 September 1996
OE Vol. 35 Issue 09
KEYWORDS: Point spread functions, Electron beam lithography, Scattering, Laser scattering, Backscatter, Analog electronics, Optical engineering, Data processing, Electron beams, Optimization (mathematics)

Showing 5 of 17 publications
Proceedings Volume Editor (1)

SPIE Conference Volume | 3 October 1993

Conference Committee Involvement (6)
Emerging Lithographic Technologies XII
26 February 2008 | San Jose, California, United States
Emerging Lithographic Technologies XI
27 February 2007 | San Jose, California, United States
Emerging Lithographic Technologies X
21 February 2006 | San Jose, California, United States
Emerging Lithographic Technologies IX
1 March 2005 | San Jose, California, United States
SPIE Institutes for Advanced Optical Technologies 10
3 October 1993 | Bellingham, United States
Showing 5 of 6 Conference Committees
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