Dr. Christina L. Porter Profile

Dr. Christina L. Porter

at ASML

SPIE Involvement:

Author

Publications (11)

Proceedings Article | 27 April 2023 Presentation + Paper

Soft x-ray: novel metrology for 3D profilometry and device pitch overlay

Christina Porter, Teis Coenen, Niels Geypen, Sandy Scholz, Loes van Rijswijk, Han-Kwang Nienhuys, Jeroen Ploegmakers, Johan Reinink, Hugo Cramer, Rik van Laarhoven, David O'Dwyer, Peter Smorenburg, Andrea Invernizzi, Ricarda Wohrwag, Hugo Jonquiere, Juliane Reinhardt, Omar el Gawhary, Simon Mathijssen, Peter Engblom, Heidi Chin, William Blanton, Sury Ganesan, Brian Krist, Florian Gstrein, Mark Phillips

Proceedings Volume 12496, 124961I (2023) https://doi.org/10.1117/12.2658495

KEYWORDS: Etching, Metrology, Overlay metrology, Signal detection, Diffraction, Semiconducting wafers, 3D metrology, X-rays, Nanosheets, Scatterometry

Read Abstract +

Proceedings Article | 26 March 2019 Presentation

Variable-wavelength tabletop-scale EUV ptychographic complex imaging reflectometry for 3D composition determination (Conference Presentation)

Michael Tanksalvala, Christina Porter, Yuka Esashi, Galen Miley, Robert Karl, Peter Johnsen, Nicholas Jenkins, Charles Bevis, Bin Wang, Jeremy Thurston, Xiaoshi Zhang, Seth Cousin, Daniel Adams, Michael Gerrity, Henry Kapteyn, Margaret Murnane.

Proceedings Volume 10959, 109590G (2019) https://doi.org/10.1117/12.2516827

KEYWORDS: Extreme ultraviolet, Stereoscopy, Reflectometry, 3D image processing

Read Abstract +

Proceedings Article | 26 March 2019 Presentation

Progress on sub-wavelength nanoimaging with a coherent tabletop EUV source (Conference Presentation)

Charles Bevis, Robert Karl, Bin Wang, Peter Johnsen, Michael Tanksalvala, Christina Porter, Yuka Esashi, Henry Kapteyn

Proceedings Volume 10959, 109590W (2019) https://doi.org/10.1117/12.2517026

KEYWORDS: Nanoimaging, Extreme ultraviolet

Read Abstract +

Proceedings Article | 13 March 2018 Paper

Complex EUV imaging reflectometry: spatially resolved 3D composition determination and dopant profiling with a tabletop 13nm source

Christina Porter, Michael Tanksalvala, Michael Gerrity, Galen Miley, Yuka Esashi, Naoto Horiguchi, Xiaoshi Zhang, Charles Bevis, Robert Karl, Peter Johnsen, Daniel Adams, Henry Kapteyn, Margaret Murnane

Proceedings Volume 10585, 105850M (2018) https://doi.org/10.1117/12.2297464

KEYWORDS: Reflectometry, Reflectivity, Extreme ultraviolet, Silicon, Coherence imaging, Cameras, Stereoscopy, 3D image processing, 3D metrology, Profiling

Read Abstract +

Proceedings Article | 13 March 2018 Paper

Prototype through-pellicle coherent imaging using a 30nm tabletop EUV source

Charles Bevis, Robert Karl, Bin Wang, Yuka Esashi, Michael Tanksalvala, Christina Porter, Peter Johnsen, Daniel Adams, Margaret Murnane, Henry Kapteyn

Proceedings Volume 10585, 105852O (2018) https://doi.org/10.1117/12.2307861

KEYWORDS: Coherence imaging, Extreme ultraviolet, Extreme ultraviolet lithography, Pellicles, Photomasks, Imaging systems, Metrology, Wafer-level optics, Reflectivity, Semiconducting wafers

Read Abstract +

Proceedings Article | 13 March 2018 Presentation + Paper

Characterization and imaging of nanostructured materials using tabletop extreme ultraviolet light sources

Robert Karl, Joshua Knobloch, Travis Frazer, Michael Tanksalvala, Christina Porter, Charles Bevis, Weilun Chao, Begoña Abad Mayor, Daniel Adams, Giulia Mancini, Jorge Hernandez-Charpak, Henry Kapteyn, Margaret Murnane

Proceedings Volume 10585, 105850N (2018) https://doi.org/10.1117/12.2297223

KEYWORDS: Acoustics, Extreme ultraviolet, Nanostructures, Diffraction, Coherence imaging, Nickel, Thin films, Wave propagation, Silicon, Nanostructuring

Read Abstract +

Proceedings Article | 28 March 2017 Paper

Sub-wavelength transmission and reflection mode tabletop imaging with 13nm illumination via ptychography CDI

Michael Tanksalvala, Christina Porter, Dennis Gardner, Michael Gerrity, Giulia Mancini, Xiaoshi Zhang, Galen Miley, Elisabeth Shanblatt, Benjamin Galloway, Charles Bevis, Robert Karl, Daniel Adams, Henry Kapteyn, Margaret Murnane

Proceedings Volume 10145, 101450L (2017) https://doi.org/10.1117/12.2271386

KEYWORDS: Diffraction, Sensors, Extreme ultraviolet, Reconstruction algorithms, Image resolution, Mirrors, Spatial resolution, Image transmission, Microscopes, Detection and tracking algorithms

Read Abstract +

Proceedings Article | 30 September 2016 Presentation + Paper

Multiple beam ptychography for large field of view imaging

Charles Bevis, Robert Karl, Jonathan Reichanadter, Dennis Gardner, Christina Porter, Elisabeth Shanblatt, Michael Tanksalvala, Giulia Mancini, Margaret Murnane, Henry Kapteyn, Daniel Adams

Proceedings Volume 9948, 99480U (2016) https://doi.org/10.1117/12.2236242

KEYWORDS: Coherence imaging, Image resolution, Diffraction, Sensors, Imaging systems, X-ray imaging, X-rays, Data acquisition, Microscopes, Extreme ultraviolet

Read Abstract +

Proceedings Article | 21 April 2016 Paper

Lensless hyperspectral spectromicroscopy with a tabletop extreme-ultraviolet source

Dennis Gardner, Bosheng Zhang, Matthew Seaberg, Elisabeth Shanblatt, Christina Porter, Robert Karl, Christopher Mancuso, Henry Kapteyn, Margaret Murnane, Daniel Adams

Proceedings Volume 9778, 977808 (2016) https://doi.org/10.1117/12.2220711

KEYWORDS: Extreme ultraviolet, Coherence imaging, Defect inspection, Process control, Multiplexing, Diffraction, Reflectivity, Photons, Coherent x-ray sources, Phase imaging, X-rays, Silicon, Microscopy

Read Abstract +

Proceedings Article | 21 April 2016 Paper

Multiple beam ptychography

Robert Karl, Charles Bevis, Raymond Lopez-Rios, Jonathan Reichanadter, Dennis Gardner, Christina Porter, Elisabeth Shanblatt, Michael Tanksalvala, Giulia Mancini, Margaret Murnane, Henry Kapteyn, Daniel Adams

Proceedings Volume 9778, 97780F (2016) https://doi.org/10.1117/12.2220416

KEYWORDS: Polarization, Spectroscopy, Coherence imaging, Laser beam diagnostics, Deconvolution, Reconstruction algorithms, Metrology, Spatial filters, Diffraction gratings, Wave propagation

Read Abstract +

Proceedings Article | 21 April 2016 Paper

Spectroscopic imaging of buried layers in 2+1D via tabletop ptychography with high-harmonic EUV illumination

Dennis Gardner, Christina Porter, Elisabeth Shanblatt, Giulia Mancini, Robert Karl, Michael Tanksalvala, Charles Bevis, Henry Kapteyn, Margaret Murnane, Daniel Adams

Proceedings Volume 9778, 97780J (2016) https://doi.org/10.1117/12.2220368

KEYWORDS: Extreme ultraviolet, Coherence imaging, Microscopy, Spectroscopy, High harmonic generation, Overlay metrology, Imaging spectroscopy, Mirrors, Interfaces

Read Abstract +

Showing 5 of 11 publications

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years