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Christoph Weichert
at Physikalisch-Technische Bundesanstalt
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Publications (4)
SPIE Journal Paper | 22 May 2014
Improved measurement performance of the Physikalisch-Technische Bundesanstalt nanometer comparator by integration of a new Zerodur sample carriage
Jens Flügge, Rainer Köning, Eugen Schötka, Christoph Weichert, Paul Köchert, Harald Bosse, Horst Kunzmann
OE, Vol. 53, Issue 12, 122404, (May 2014) https://doi.org/10.1117/12.10.1117/1.OE.53.12.122404
KEYWORDS: Interferometers, Zerodur, Computer programming, Photomasks, Calibration, Metrology, Mirrors, Manufacturing, Microscopes
Proceedings Article | 17 June 2009 Paper
A model based approach to reference-free straightness measurement at the Nanometer Comparator
C. Weichert, M. Stavridis, M. Walzel, C. Elster, A. Wiegmann, M. Schulz, R. Köning, J. Flügge, R. Tutsch
Proceedings Volume 7390, 73900O (2009) https://doi.org/10.1117/12.827681
KEYWORDS: Sensors, Error analysis, Interferometers, Mirrors, Microscopes, Computer programming, Calibration, Environmental sensing, Virtual reality, Head
Proceedings Article | 12 January 2009 Paper
Interferometry at the PTB Nanometer Comparator: design, status and development
J. Flügge, Ch. Weichert, H. Hu, R. Köning, H. Bosse, A. Wiegmann, M. Schulz, C. Elster, R. Geckeler
Proceedings Volume 7133, 713346 (2009) https://doi.org/10.1117/12.821252
Proceedings Article | 17 October 2008 Paper
Development of a 1.5D reference comparator for position and straightness metrology on photomasks
J. Flügge, R. Köning, Ch. Weichert, W. Häßler-Grohne, R. Geckeler, A. Wiegmann, M. Schulz, C. Elster, H. Bosse
Proceedings Volume 7122, 71222Y (2008) https://doi.org/10.1117/12.801251
KEYWORDS: Interferometers, Photomasks, Metrology, Mirrors, Computer programming, Calibration, Sensors, Microscopes, Beam splitters, Image registration
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