Prof. Christophe Gorecki Profile

Prof. Christophe Gorecki

SPIE Involvement:

Author | Editor

Publications (96)

Proceedings Article | 1 March 2019 Presentation + Paper

Advanced microfabrication technologies for miniature caesium vapor cells for atomic clocks

C. Gorecki, N. Passilly, V. Maurice, S. Bargiel, R. Chutani, R. Boudot, R. Vicarini, S. Galliou

Proceedings Volume 10934, 109342F (2019) https://doi.org/10.1117/12.2506225

KEYWORDS: Cesium, Glasses, Clocks, Atomic clocks, Silicon, Semiconducting wafers, Microfabrication, Neon, Vertical cavity surface emitting lasers, Metrology

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Proceedings Article | 7 September 2018 Paper

MOEMS-based imaging probe with integrated Mirau micro-interferometer and MEMS microscanner for swept-source OCT endomicroscopy

C. Gorecki, S. Bargiel, Q. Tanguy, P. Struk, N. Passilly

Proceedings Volume 10834, 108340M (2018) https://doi.org/10.1117/12.2319084

KEYWORDS: Microelectromechanical systems, Optical coherence tomography, Microopto electromechanical systems, Interferometry, Mirau interferometers, Scanners, Objectives, GRIN lenses, Glasses, Endomicroscopy

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Proceedings Article | 24 May 2018 Paper

Micro Glass Blowing platform for microfabrication of microoptical components

C. Gorecki, J. Vincente Carrion, N. Passilly, S. Bargiel

Proceedings Volume 10678, 1067814 (2018) https://doi.org/10.1117/12.2311305

KEYWORDS: Axicons, Glasses, Bessel beams, Silicon, Semiconducting wafers, Microfabrication, Micromachining, Wafer bonding, Fabrication, Microlens

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Proceedings Article | 24 May 2018 Presentation + Paper

The SS-OCT endomicroscopy probe based on MOEMS Mirau micro-interferometer for early stomach cancer detection

Przemyslaw Struk, Alain Billard , Sylwester Bargiel, Quentin A. Tanguy, Christophe Gorecki, Ravinder Chutani, Nicolas Passilly, Huikai Xie

Proceedings Volume 10678, 1067807 (2018) https://doi.org/10.1117/12.2311298

KEYWORDS: Microopto electromechanical systems, Optical coherence tomography, Scanners, Micromirrors, Stomach, Microelectromechanical systems, Glasses, Endomicroscopy, Cancer, GRIN lenses

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Proceedings Article | 26 June 2017 Paper

Topography measurements of high NA aspherical microlenses by digital holographic microscopy with spherical illumination

Michal Józwik, Marta Mikuła, Tomasz Kozacki, Julianna Kostencka, Christophe Gorecki

Proceedings Volume 10329, 103290C (2017) https://doi.org/10.1117/12.2270150

KEYWORDS: Digital holography, Spherical lenses, Microlens, Microscopy, Aspheric lenses, Reflection, Reconstruction algorithms, Optical spheres

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Proceedings Article | 27 April 2016 Paper

Wafer-level fabrication of arrays of glass lens doublets

Nicolas Passilly, Stéphane Perrin, Jorge Albero, Johann Krauter, Olivier Gaiffe, Ludovic Gauthier-Manuel, Luc Froehly, Justine Lullin, Sylwester Bargiel, Wolfgang Osten, Christophe Gorecki

Proceedings Volume 9888, 98880T (2016) https://doi.org/10.1117/12.2228833

KEYWORDS: Optical components, Polishing, Micro optics, Glasses, Optical aberrations, Semiconducting wafers, Microlens

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Systems for imaging require to employ high quality optical components in order to dispose of optical aberrations and thus reach sufficient resolution. However, well-known methods to get rid of optical aberrations, such as aspherical profiles or diffractive corrections are not easy to apply to micro-optics. In particular, some of these methods rely on polymers which cannot be associated when such lenses are to be used in integrated devices requiring high temperature process for their further assembly and separation. Among the different approaches, the most common is the lens splitting that consists in dividing the focusing power between two or more optical components. In here, we propose to take advantage of a wafer-level technique, devoted to the generation of glass lenses, which involves thermal reflow in silicon cavities to generate lens doublets. After the convex lens sides are generated, grinding and polishing of both stack sides allow, on the first hand, to form the planar lens backside and, on the other hand, to open the silicon cavity. Nevertheless, silicon frames are then kept and thinned down to form well-controlled and auto-aligned spacers between the lenses. Subsequent accurate vertical assembly of the glass lens arrays is performed by anodic bonding. The latter ensures a high level of alignment both laterally and axially since no additional material is required. Thanks to polishing, the generated lens doublets are then as thin as several hundreds of microns and compatible with micro-opto-electro-systems (MOEMS) technologies since they are only made of glass and silicon. The generated optical module is then robust and provide improved optical performances. Indeed, theoretically, two stacked lenses with similar features and spherical profiles can be almost diffraction limited whereas a single lens characterized by the same numerical aperture than the doublet presents five times higher wavefront error. To demonstrate such assumption, we fabricated glass lens doublets and compared them to single lenses of equivalent focusing power. For similar illumination, the optical aberrations are significantly reduced.

Proceedings Article | 26 April 2016 Paper

Array-type miniature interferometer as the core optical microsystem of an optical coherence tomography device for tissue inspection

Nicolas Passilly, Justine Lullin, Stéphane Perrin, Jorge Albero, Sylwester Bargiel, Luc Froehly, Christophe Gorecki, Johann Krauter, Wolfgang Osten, Wei-Shan Wang, Maik Wiemer

Proceedings Volume 9890, 98900C (2016) https://doi.org/10.1117/12.2229477

KEYWORDS: Skin, Microopto electromechanical systems, Optical coherence tomography, Microsystems, Mirrors, Silicon, Semiconducting wafers, Beam splitters

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Proceedings Article | 26 April 2016 Paper

Aberration retrieval for the characterization of micro-optical components

Stephane Perrin, Nicolas Passilly, Luc Froehly, Christophe Gorecki

Proceedings Volume 9890, 98901A (2016) https://doi.org/10.1117/12.2228847

KEYWORDS: Wavefronts, Phase retrieval, Microlens, Interferometry, Micro optics, Metrology, Optical components, Optical properties, Optical aberrations, Imaging systems, Digital holography, Microscopes, Objectives, Wave propagation

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Proceedings Article | 26 April 2016 Paper

Vertical comb-drive microscanner with 4x4 array of micromirrors for phase-shifting Mirau microinterferometry

Sylwester Bargiel, Justine Lullin, Patrice Lemoal, Stéphane Perrin, Nicolas Passilly, Jorge Albero, Luc Froehly, Franck Lardet-Vieudrin, Christophe Gorecki

Proceedings Volume 9890, 98900D (2016) https://doi.org/10.1117/12.2230487

KEYWORDS: Micromirrors, Silicon, Interferometry, Optical coherence tomography, Phase shifts, Microopto electromechanical systems, Microactuators, Phase shifting, Mirau interferometers, Semiconducting wafers, Photomasks, Etching

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Proceedings Article | 26 April 2016 Paper

Vertical integration of array-type miniature interferometers at wafer level by using multistack anodic bonding

Wei-Shan Wang, Maik Wiemer, Joerg Froemel, Tom Enderlein, Thomas Gessner, Justine Lullin, Sylwester Bargiel, Nicolas Passilly, Jorge Albero, Christophe Gorecki

Proceedings Volume 9890, 989011 (2016) https://doi.org/10.1117/12.2229884

KEYWORDS: Semiconducting wafers, Interferometers, Microelectromechanical systems, Microlens, Mirau interferometers, Wafer bonding, Microopto electromechanical systems, Optical coherence tomography, Scanners, Beam splitters, Laser cutting, Gold, Glasses

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Proceedings Article | 1 September 2015 Paper

Performance analysis of a full-field and full-range swept-source OCT system

J. Krauter, K. Körner, N. Passilly, C. Gorecki, T. Boettcher, M. Gronle, W. Osten, L. Froehly, S. Perrin

Proceedings Volume 9576, 957609 (2015) https://doi.org/10.1117/12.2189885

KEYWORDS: Optical coherence tomography, Mirrors, Sensors, Light sources, Cameras, Imaging systems, Objectives, Signal processing, Optical imaging, Beam splitters

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Proceedings Article | 24 August 2015 Paper

Two configurations of miniature Mirau interferometry for swept-source OCT imaging: applications in dermatology and gastroendoscopy

Christophe Gorecki

Proceedings Volume 9660, 96600Z (2015) https://doi.org/10.1117/12.2197046

KEYWORDS: Micromirrors, Mirrors, Optical coherence tomography, Interferometry, Microopto electromechanical systems, Microsystems, Mirau interferometers, Interferometers, Dermatology, Cancer

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Proceedings Article | 22 June 2015 Paper

Full-field swept-source optical coherence tomography with phase-shifting techniques for skin cancer detection

J. Krauter, T. Boettcher, K. Körner, M. Gronle, W. Osten, N. Passilly, L. Froehly, S. Perrin, C. Gorecki

Proceedings Volume 9529, 952913 (2015) https://doi.org/10.1117/12.2189278

KEYWORDS: Optical coherence tomography, Cameras, Phase shifts, Mirrors, Light sources, Signal to noise ratio, Skin cancer, Molybdenum, Interferometers, Phase shifting

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Proceedings Article | 27 February 2015 Paper

Multi-wafer bonding technology for the integration of a micromachined Mirau interferometer

Wei-Shan Wang, Maik Wiemer, Joerg Froemel, Sylwester Bargiel, Justine Lullin, Nicolas Passilly, Christophe Gorecki, Thomas Gessner

Proceedings Volume 9375, 93750P (2015) https://doi.org/10.1117/12.2077641

KEYWORDS: Semiconducting wafers, Wafer bonding, Interfaces, Mirau interferometers, Microopto electromechanical systems, Microlens, Glasses, Silicon, Optical coherence tomography, Wafer-level optics

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Proceedings Article | 27 February 2015 Paper

Technological platform for vertical multi-wafer integration of miniature imaging instruments

S. Bargiel, M. Baranski, N. Passilly, C. Gorecki, M. Wiemer, J. Frömel, D. Wünsch, W. Wang

Proceedings Volume 9375, 93750L (2015) https://doi.org/10.1117/12.2078007

KEYWORDS: Glasses, Silicon, Microlens, Semiconducting wafers, Wafer-level optics, Confocal microscopy, Etching, Microscopes, Microopto electromechanical systems, Beam splitters

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Proceedings Article | 18 August 2014 Paper

Simple setup for optical characterization of microlenses

Stephane Perrin, Maciej Baranski, Nicolas Passilly, Luc Froehly, Jorge Albero, Sylwester Bargiel, Christophe Gorecki

Proceedings Volume 9204, 92040D (2014) https://doi.org/10.1117/12.2061299

KEYWORDS: Microlens, Modulation transfer functions, Imaging systems, Optical components, Microscopes, Objectives, Molybdenum, Wavefronts, 3D metrology, Etching

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Proceedings Article | 2 May 2014 Paper

Arrays of millimeter-sized glass lenses for miniature inspection systems

L. Gauthier-Manuel, J. Albero, S. Perrin, S. Bargiel, M. Baranski, N. Passilly, C. Gorecki

Proceedings Volume 9130, 91300U (2014) https://doi.org/10.1117/12.2051043

KEYWORDS: Glasses, Microlens, Silicon, Lenses, Inspection, Semiconducting wafers, Fabrication, Matrices, Microlens array, Deep reactive ion etching

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Proceedings Article | 1 May 2014 Paper

Optical design of a vertically integrated array-type Mirau-based OCT system

J. Krauter, T. Boettcher, W. Osten, W. Lyda, N. Passilly, L. Froehly, S. Bargiel, J. Albero, S. Perrin, J. Lullin, C. Gorecki

Proceedings Volume 9132, 91320L (2014) https://doi.org/10.1117/12.2054573

KEYWORDS: Optical coherence tomography, Interferometers, Optical design, Skin, Beam splitters, Sensors, Cameras, Imaging systems, Electroluminescent displays, Tissue optics

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Proceedings Article | 1 May 2014 Paper

Metrology of micro-optical components quality using direct measurement of 3D intensity point spread function

Nicolas Passilly, Luc Froehly, Jorge Albero, Sylwester Bargiel, Christophe Gorecki, Stephane Perrin, Maciej Baranski

Proceedings Volume 9132, 913216 (2014) https://doi.org/10.1117/12.2051122

KEYWORDS: 3D metrology, Optical components, Objectives, Imaging systems, Point spread functions, Microscopes, Cameras, Microlens, CMOS cameras, High dynamic range imaging

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Proceedings Article | 13 March 2013 Paper

3D micro-optical lens scanner made by multi-wafer bonding technology

N. Passilly, M. Barański, M. Wiemer, C. Jia, J. Frömel, C. Gorecki, S. Bargiel

Proceedings Volume 8616, 861605 (2013) https://doi.org/10.1117/12.2002422

KEYWORDS: Microlens, Glasses, Silicon, Semiconducting wafers, 3D scanning, Wafer bonding, Scanners, Microactuators, Microscopes, Ceramics

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Proceedings Article | 13 September 2012 Paper

Micromachined array-type Mirau interferometer for MEMS metrology

S. Bargiel, J. Albero, N. Passilly, M. Kujawinska, U. Zeitner, C. Gorecki

Proceedings Volume 8494, 849403 (2012) https://doi.org/10.1117/12.932226

KEYWORDS: Semiconducting wafers, Microelectromechanical systems, Mirau interferometers, Interferometry, Glasses, Microlens, Interferometers, Micromirrors, Beam splitters, Inspection

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Proceedings Article | 13 September 2012 Paper

Determination of failure mechanisms for AlN-based microcantilevers with use of Twyman-Green interferometry

Christophe Gorecki

Proceedings Volume 8494, 84940T (2012) https://doi.org/10.1117/12.932225

KEYWORDS: Aluminum nitride, Reliability, Interferometry, Microelectromechanical systems, Electrodes, Finite element methods, Humidity, Thin films, Silicon, Metrology

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Proceedings Article | 9 May 2012 Paper

Fabrication of 100% fill factor arrays of microlenses from silicon molds

Nicolas Passilly, Maciej Baranski, Jorge Albero, Christophe Gorecki

Proceedings Volume 8428, 84281G (2012) https://doi.org/10.1117/12.921875

KEYWORDS: Microlens, Etching, Silicon, Microlens array, Lenses, Wet etching, Spherical lenses, Semiconducting wafers, Matrices, Chemical elements

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Proceedings Article | 5 May 2012 Paper

Interferometry of AlN-based microcantilevers to determine the material properties and failure mechanisms

Katarzyna Krupa, Michał Józwik, Christophe Gorecki

Proceedings Volume 8430, 84300D (2012) https://doi.org/10.1117/12.922887

KEYWORDS: Aluminum nitride, Reliability, Electrodes, Resistance, Interferometry, Humidity, Microelectromechanical systems, Thin films, Finite element methods, Temperature metrology

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Proceedings Article | 3 November 2011 Paper

Parallel approach to MEMS and micro-optics interferometric testing

M. Józwik, U. Zeitner, R. Paris, M. Kujawińska, K. Gastinger, C. Gorecki, S. Beer, K. Haugholt, A. Styk, P. Lambelet

Proceedings Volume 8011, 80117O (2011) https://doi.org/10.1117/12.903256

KEYWORDS: Semiconducting wafers, Interferometers, Inspection, Diffractive optical elements, Wafer-level optics, Imaging systems, Interferometry, Lithium, Microelectromechanical systems, Micro optics

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Proceedings Article | 18 January 2011 Paper

Spectroscopy of micro-fabricated Cs vapours cells for miniature atomic clocks

M. Hasegawa, G. Mileti, C. Gorecki, D. Miletic, C. Affolderbach

Proceedings Volume 7747, 77470F (2011) https://doi.org/10.1117/12.882194

KEYWORDS: Cesium, Clocks, Microelectromechanical systems, Atomic clocks, Temperature metrology, Modulation, Microfabrication, Neon, Spectroscopy, Microwave radiation

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Proceedings Article | 2 August 2010 Paper

Reliability study of AlN-driven microcantilevers based on interferometric measurements of their static and dynamic behaviours

Katarzyna Krupa, Michal Jozwik, Christophe Gorecki, Romuald Józwicki

Proceedings Volume 7791, 779104 (2010) https://doi.org/10.1117/12.862091

KEYWORDS: Aluminum nitride, Reliability, Electrodes, Interferometry, Silicon, Humidity, Microelectromechanical systems, Thin films, Transducers, Accelerated life testing

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Proceedings Article | 2 August 2010 Paper

Design, technology, and signal processing for DOE-based microinterferometer array applied in new generation M(O)EMS test equipment

K. Gastinger, M. Kujawinska, S. Beer, M. Józwik, A. Røyset, U. Zeitner, R. Moosburger, C. Gorecki, A. Styk

Proceedings Volume 7791, 779103 (2010) https://doi.org/10.1117/12.862170

KEYWORDS: Interferometers, Semiconducting wafers, Cameras, Lithium, Imaging systems, Inspection, Diffraction gratings, Demodulation, Signal processing, Wafer-level optics

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Proceedings Article | 14 May 2010 Paper

Simulation and in-plane movement characterization of 2D MEMS platform

Christophe Gorecki, Olivier Parriaux, Svetlen Tonchev, Jerzy Krężel, Karolina Laszczyk, Małgorzata Kujawińska, Sylwester Bargiel

Proceedings Volume 7718, 77180H (2010) https://doi.org/10.1117/12.855747

KEYWORDS: Microelectromechanical systems, Diffraction gratings, Phase shifts, Optical design, Interferometry, Picosecond phenomena, Actuators, Silicon, Sensors, Phase shifting

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Proceedings Article | 14 May 2010 Paper

Integrated glass lenses fabrication for parallel interferometric inspection systems of MEMS and MOEMS

Jorge Albero, Kay Gastinger, Christophe Gorecki, Sylwester Bargiel

Proceedings Volume 7716, 771621 (2010) https://doi.org/10.1117/12.853907

KEYWORDS: Silicon, Glasses, Etching, Microlens, Inspection, Semiconducting wafers, Interferometers, Interferometry, Anisotropic etching, Spherical lenses

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Proceedings Article | 14 May 2010 Paper

Level set method for microfabrication simulations

Christophe Gorecki, Jorge Albero, Maciej Baranski, Lukasz Nieradko, Rafal Kasztelanic

Proceedings Volume 7716, 77161W (2010) https://doi.org/10.1117/12.853836

KEYWORDS: Etching, Silicon, Data modeling, Microfabrication, Finite element methods, Interfaces, Glasses, Wet etching, Process modeling, Diffusion

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Proceedings Article | 19 May 2009 Paper

Silicon comb-drive X-Y microstage with frame-in-the-frame architecture for MOEMS applications

Christophe Gorecki, Sylwester Bargiel, Małgorzata Kujawińska, Jerzy Krężel, Karolina Laszczyk

Proceedings Volume 7362, 736210 (2009) https://doi.org/10.1117/12.821460

KEYWORDS: Silicon, Electrodes, Actuators, Deep reactive ion etching, Bridges, Photoresist materials, Chromium, Microopto electromechanical systems, Microlens, Microscopes

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Proceedings Article | 11 August 2008 Paper

Twymann Green interferometry in study of AlN material as an actuation layer in MEMS

A. Andrei, C. Gorecki, M. Jozwik, L. Nieradko, K. Krupa, P. Delobelle, L. Hirsinger

Proceedings Volume 7064, 706402 (2008) https://doi.org/10.1117/12.796072

KEYWORDS: Aluminum nitride, Finite element methods, Interferometry, Microelectromechanical systems, Silicon, Electrodes, Thin films, Actuators, Scanning electron microscopy, Multilayers

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SPIE Journal Paper | 1 July 2008

New approach of fabrication and dispensing of micromachined cesium vapor cell

Lukasz Nieradko, Christophe Gorecki, Adel Douahi, Vincent Giordano, Jean-Charles Beugnot, Jan Dziuban, Marco Moraja

JM3, Vol. 7, Issue 03, 033013, (July 2008) https://doi.org/10.1117/12.10.1117/1.2964288

KEYWORDS: Cesium, Absorption, Silicon, Glasses, Atomic clocks, Semiconducting wafers, Etching, Modulation, Microelectromechanical systems, Chemical species

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Proceedings Article | 20 May 2008 Paper

Integrated optic Michelson interferometer for sensors application

P. Marć, Ł. Nieradko, C. Gorecki

Proceedings Volume 6995, 69950A (2008) https://doi.org/10.1117/12.780791

KEYWORDS: Silicon, Waveguides, Atomic force microscopy, Integrated optics, Oxides, Mirrors, Michelson interferometers, Interferometers, Actuators, Matrices

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Proceedings Article | 14 May 2008 Paper

Si moulds for glass and polymer microlenses replication

J. Pietarinen, H. Ottevaere, C. Gorecki, J. Albero, V. Gomez, L. Nieradko

Proceedings Volume 6992, 69920A (2008) https://doi.org/10.1117/12.783093

KEYWORDS: Etching, Silicon, Microlens, Glasses, Anisotropic etching, Semiconducting wafers, Photomasks, Polymers, Isotropic etching, Optical lithography

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Proceedings Article | 25 April 2008 Paper

AlN driven microcantilever actuators: modeling, fabrication, characterization

L. Hirsinger, A. Andrei, M. Józwik, K. Krupa, P. Delobelle, Ł. Nieradko, C. Gorecki

Proceedings Volume 6995, 69950E (2008) https://doi.org/10.1117/12.781262

KEYWORDS: Aluminum nitride, Finite element methods, Interferometry, Silicon, Actuators, Microelectromechanical systems, Electrodes, Multilayers, Thin films, Silicon films

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Proceedings Article | 25 April 2008 Paper

Characterization of MEMS cantilevers using lensless digital holographic microscope

Alexandru Andrei, Vijay Raj Singh, Christophe Gorecki, Anand Asundi, Lukasz Nieradko

Proceedings Volume 6995, 69950F (2008) https://doi.org/10.1117/12.782981

KEYWORDS: Digital holography, 3D image reconstruction, Holography, Holograms, Microscopes, Microelectromechanical systems, Aluminum nitride, Beam splitters, Vibrometry, Charge-coupled devices

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Proceedings Article | 14 August 2006 Paper

Static and dynamic measurements of active MEMS by Twyman-Green interferometry: case of AlN-based microactuators

K. Dogheche, K. Krupa, P. Delobelle, C. Gorecki, S. Balandras, A. Andrei, M. Jozwik, L. Hirsinger

Proceedings Volume 6293, 629308 (2006) https://doi.org/10.1117/12.680691

KEYWORDS: Aluminum nitride, Microelectromechanical systems, Interferometry, Thin films, Transducers, Acoustics, Microactuators, Actuators, Ultrasonics, Silicon

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Proceedings Article | 9 May 2006 Paper

Reliability studies of micro-optical components in NEMO

L. Hirsinger, M. Van Uffelen, M. Jozwik, P. Kniazewski, A. Last, N. Huber, L. Nieradko, A. Andrei, D. Rabus, L. Salbut, E. Ernst, S. Eve, C. Gorecki, O. Kraft, P. Delobelle, F. Berghmans, K. Krupa, M. Kujawinska

Proceedings Volume 6193, 61930A (2006) https://doi.org/10.1117/12.662001

KEYWORDS: Refractive index, Reliability, Aluminum nitride, Metals, Optical fibers, Microelectromechanical systems, Tomography, Micro optics, Gold, Glasses

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Proceedings Article | 28 April 2006 Paper

Fabrication, characterization, and reliability study of AlN-driven cantilevers

M. Jozwik, L. Hirsinger, C. Gorecki, P. Delobelle, L. Nieradko, A. Andrei, K. Krupa

Proceedings Volume 6188, 61880S (2006) https://doi.org/10.1117/12.663526

KEYWORDS: Aluminum nitride, Metals, Reliability, Interferometry, Etching, Reactive ion etching, Microelectromechanical systems, Aluminum, Electrodes, Silicon

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Proceedings Article | 28 April 2006 Paper

Benchmarking instrumentation tools for the characterization of micro-optics within the EC Network of Excellence on Micro-Optics (NEMO)

T. Kossek, H. Ottevaere, C. Gorecki, R. Piramidowicz, S. Pelli, N. Destouches, P. Szcepanski, M. Kujawinska

Proceedings Volume 6188, 618819 (2006) https://doi.org/10.1117/12.663888

KEYWORDS: Micro optics, Birefringence, Absorption, Microlens, Fiber Bragg gratings, Interferometers, Diffraction gratings, Photonics, Luminescence, Applied physics

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Proceedings Article | 21 April 2006 Paper

New generation of fully integrated optical microscopes on-chip: application to confocal microscope

Lukasz Nieradko, Sylwester Bargiel, Jan Dziuban, Christophe Gorecki, Michal Józwik

Proceedings Volume 6186, 618602 (2006) https://doi.org/10.1117/12.663770

KEYWORDS: Microlens, Silicon, Microscopes, Glasses, Confocal microscopy, Vertical cavity surface emitting lasers, 3D scanning, Etching, Actuators, Microopto electromechanical systems

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SPIE Journal Paper | 1 April 2006

Fabrication and optical packaging of an integrated Mach-Zehnder interferometer on top of a movable micromirror

Lukasz Nieradko, Christophe Gorecki, Michal Józwik, Andrei Sabac, Rolf Hoffmann, Andreas Bertz

JM3, Vol. 5, Issue 02, 023009, (April 2006) https://doi.org/10.1117/12.10.1117/1.2203366

KEYWORDS: Micromirrors, Waveguides, Silicon, Integrated optics, Semiconducting wafers, Mirrors, Photomasks, Sensors, Packaging, Etching

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Proceedings Article | 7 March 2006 Paper

Optimization of plasma-deposited silicon oxinitride films for interferometric MOEMS applications

Christophe Gorecki

Proceedings Volume 4101, (2006) https://doi.org/10.1117/12.498439

KEYWORDS: Plasma enhanced chemical vapor deposition, Waveguides, Silicon, Refractive index, Thin films, Plasma, Hydrogen, Silicon films, Annealing, Microopto electromechanical systems

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Proceedings Article | 12 October 2005 Paper

Dynamic measurements of actuators driven by AlN layers

Jacek Kacperski, Lukasz Nieradko, Michal Jozwik, Sergio Camacho Leon, Christophe Gorecki, Malgorzata Kujawinska

Proceedings Volume 5958, 59580J (2005) https://doi.org/10.1117/12.622853

KEYWORDS: Liquid crystal on silicon, Interferometry, Finite element methods, Actuators, Aluminum nitride, Interferometers, Beam shaping, Phase shifts, Electrodes, Microelectromechanical systems

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SPIE Journal Paper | 1 October 2005

Multifunctional interferometric platform for on-chip testing the micromechanical properties of MEMS/MOEMS

Christophe Gorecki, Michal Józwik, Leszek Salbut

JM3, Vol. 4, Issue 04, 041402, (October 2005) https://doi.org/10.1117/12.10.1117/1.2110027

KEYWORDS: Interferometry, Actuators, Silicon, Plasma enhanced chemical vapor deposition, Ferroelectric materials, Refractive index, Microactuators, Microelectromechanical systems, Motion measurement, Interferometers

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Proceedings Article | 30 September 2005 Paper

Integrated optics and MEMS in microsensing

Christophe Gorecki

Proceedings Volume 5956, 59560E (2005) https://doi.org/10.1117/12.624494

KEYWORDS: Waveguides, Silicon, Sensors, Integrated optics, Information operations, Micromachining, Microelectromechanical systems, Optical fibers, Optical alignment, Interferometers

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Proceedings Article | 29 August 2005 Paper

Micro-optic measurement techniques and instrumentation in the European Network of Excellence for Micro-Optics (NEMO)

Malgorzata Kujawinska, Hugo Thienpont, Heidi Ottevaere, Pawel Szczepanski, Christophe Gorecki

Proceedings Volume 5858, 585801 (2005) https://doi.org/10.1117/12.622751

KEYWORDS: Micro optics, Microlens, 3D metrology, Digital Light Processing, Microscopes, Software development, Waveguides, Photonics, Refractive index, 3D modeling

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The measurement and characterization of micro-optical elements, systems and materials related to a variety of aspects like shape, displacement, deformation, strain / stresses, material constants, chemical composition etc. is a huge area which requires extended, multidisciplinary knowledge and a wide range of expensive instrumentation. The NEMO Centre for Measurement and Instrumentation includes twenty four institutes, whose joint expertise and capabilities do not only cover nearly all important measurement and characterization methods; they also comprise a big pool of commercial and internally developed instrumentation. In this paper we present the main tasks of this Centre. These tasks consist in e.g. providing benchmarks of the instrumentation and analysis software, providing an integrated pool of equipment for measurement and characterization of materials and components, identifying the gaps in measurement capabilities of existing equipment and providing guidance for development of new measurement methods and instrumentation, the development of proof-of principle demonstrators of novel measurement systems, and the development of numerical-experimental methods in collaboration with the virtual Centre for Modeling to support the development of novel micro-optics. In this paper we will also review the expertise of the NEMO partners in micro-optics measurement and characterization with the emphasis on aspects such as: microlens array testing, waveguide and fibre optics characterization, measurement of static and active microelements, determination of 3D refractive index distribution, subwavelength structure characterization, and shape monitoring and strain distribution testing in micro-optic packages. Also interesting issues connected with the definition of optimised measurement chains, data analysis and standardization of measurement procedures will be touched upon. Finally we will discuss the future structure of the Centre and its potential to provide virtual or on-site access to an electronic library which already contains a considerable amount of information on the large pool of instrumentation, jointly provided by the NEMO's partners.

Proceedings Article | 1 July 2005 Paper

Optical microlenses for MOEMS

Rafal Walczak, Roberto Carasco, Jan Dziuban, Ignacio Moreno, Christophe Gorecki, Malgorzata Kopytko, Michal Jozwik, Lukasz Nieradko

Proceedings Volume 5836, (2005) https://doi.org/10.1117/12.607912

KEYWORDS: Etching, Glasses, Silicon, Microlens, Semiconducting wafers, Spherical lenses, Polishing, Photomasks, Anisotropic etching, Microopto electromechanical systems

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Proceedings Article | 13 June 2005 Paper

Development and investigation of high resolution resonant pressure sensor with optical interrogation

Michal Jozwik, Christophe Gorecki, Dominique Heinis, Thierry Dean, Andrei Sabac, Alain Jacobelli

Proceedings Volume 5856, (2005) https://doi.org/10.1117/12.612605

KEYWORDS: Sensors, Waveguides, Transducers, Ferroelectric materials, Refractive index, Optical resolution, Microelectromechanical systems, Actuators, Protactinium, Silicon

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Proceedings Article | 22 January 2005 Paper

Active membrane in situ read-out by monolithic integration of silicon-based Mach-Zehnder interferometer

Thierry Dean, Christophe Gorecki, Michal Jozwik, Rolf Hoffman, Lukasz Nieradko, Alain Jackobelli, Andrei Sabac, Andreas Bertz

Proceedings Volume 5719, (2005) https://doi.org/10.1117/12.592237

KEYWORDS: Waveguides, Mirrors, Sensors, Silicon, Refractive index, Microelectromechanical systems, Integrated optics, Micromirrors, Transducers, Mach-Zehnder interferometers

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Proceedings Article | 17 August 2004 Paper

Interferometric methods for static and dynamic characterizations of micromembranes for sensing functions

Jacek Kacperski, Christophe Gorecki, Alain Jacobelli, Leszek Salbut, Adam Styk, Michal Jozwik, Hakan Urey, Thierry Dean

Proceedings Volume 5458, (2004) https://doi.org/10.1117/12.545574

KEYWORDS: Interferometry, Semiconducting wafers, Manufacturing, Silicon, Electrodes, Phase interferometry, Shape analysis, Ferroelectric materials, Bessel functions, Statistical analysis

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Proceedings Article | 17 August 2004 Paper

A miniaturized SNOM sensor based on the optical feedback inside the VCSEL cavity

Christophe Gorecki, Dominique Heinis

Proceedings Volume 5458, (2004) https://doi.org/10.1117/12.546003

KEYWORDS: Vertical cavity surface emitting lasers, Near field optics, Near field scanning optical microscopy, Sensors, Near field, Semiconductor lasers, Light wave propagation, Quantum wells, Active optics, Microscopes

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Proceedings Article | 17 August 2004 Paper

Design, testing, and calibration of an integrated Mach-Zehnder-based optical read-out architecture for MEMS characterization

Thierry Dean, Alain Jacobelli, Christophe Gorecki, Andrei Sabac, Michal Jozwik

Proceedings Volume 5458, (2004) https://doi.org/10.1117/12.546299

KEYWORDS: Waveguides, Geometrical optics, Microelectromechanical systems, Integrated optics, Ferroelectric materials, Silicon, Phase shifts, Calibration, Light wave propagation, Radio propagation

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Proceedings Article | 2 August 2004 Paper

Evaluation of the mechanical properties of square membranes prestressed by PECVD silicon oxynitride thin films

Christophe Gorecki, Andrei Sabac, Michal Jozwik, Patrick Delobelle, Malgorzata Kujawinska

Proceedings Volume 5532, (2004) https://doi.org/10.1117/12.569806

KEYWORDS: Silicon, Refractive index, Plasma enhanced chemical vapor deposition, Thin films, Silicon films, Interferometry, Semiconducting wafers, Oxides, Finite element methods, Thin film deposition

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Proceedings Article | 24 January 2004 Paper

Fabrication and optical packaging of an integrated Mach-Zehnder interferometer on top of a moveable micromirror

Andrei Sabac, Lukasz Nieradko, Christophe Gorecki, Andreas Bertz, Rolf Hoffmann

Proceedings Volume 5346, (2004) https://doi.org/10.1117/12.524726

KEYWORDS: Waveguides, Mirrors, Micromirrors, Silicon, Semiconducting wafers, Plasma enhanced chemical vapor deposition, Integrated optics, Microelectromechanical systems, Wafer-level optics, Mach-Zehnder interferometers

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Proceedings Article | 23 December 2003 Paper

Multifunctional interferometric platform for on-chip testing of the micromechanical properties of MEMS/MOEMS

Christophe Gorecki, Leszek Salbut, Michal Jozwik

Proceedings Volume 5343, (2003) https://doi.org/10.1117/12.524324

KEYWORDS: Interferometry, Actuators, Ferroelectric materials, Refractive index, Silicon, Plasma enhanced chemical vapor deposition, Microactuators, Microelectromechanical systems, Electrodes, Motion measurement

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Proceedings Article | 3 October 2003 Paper

Integrated optomechanical sensor for in situ characterization of MEMS: the implementing of a readout architecture

Alain Jacobelli, K. Gut, Thierry Dean, Christophe Gorecki, P. Bey, Andrei Sabac

Proceedings Volume 5145, (2003) https://doi.org/10.1117/12.501463

KEYWORDS: Waveguides, Sensors, Microelectromechanical systems, Ferroelectric materials, Integrated optics, Optical fibers, Transducers, Refractive index, Microsensors, Electrodes

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Proceedings Article | 3 October 2003 Paper

Interferometry system for out-of-plane microdisplacement measurement: application to mechanical expertise of scratch drive actuators

Christophe Gorecki, Eric Joseph, Patrice Minotti, Michal Jozwik, Patrice Le Moal

Proceedings Volume 5145, (2003) https://doi.org/10.1117/12.502247

KEYWORDS: Actuators, Interferometry, Silicon, Microscopes, Numerical simulations, Interferometers, Microelectromechanical systems, Objectives, Wavefronts, Phase shifts

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Proceedings Article | 3 October 2003 Paper

Active microelement testing by interferometry using time-average and quasi-stroboscopic techniques

Krzysztof Patorski, Leszek Salbut, Thierry Dean, Christophe Gorecki, Alain Jacobelli, Jacek Kacperski, Michal Jozwik

Proceedings Volume 5145, (2003) https://doi.org/10.1117/12.500747

KEYWORDS: Interferometry, Bessel functions, Visualization, Ferroelectric materials, Modulation, Electrodes, Calibration, Digital holography, Spatial resolution, Optical testing

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Proceedings Article | 22 September 2003 Paper

Micromachining technology in optoelectronic sensing technologies

Christophe Gorecki

Proceedings Volume 5124, (2003) https://doi.org/10.1117/12.517046

KEYWORDS: Waveguides, Sensors, Silicon, Micromachining, Optical fibers, Fiber optics sensors, Integrated optics, Modulation, Fiber Bragg gratings, Optoelectronics

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Proceedings Article | 22 September 2003 Paper

Interferometry system for out-of-plane displacements and microshape measurements of silicon membranes

Michal Jozwik, Andrei Sabac, Christophe Gorecki

Proceedings Volume 5124, (2003) https://doi.org/10.1117/12.517118

KEYWORDS: Silicon, Thin films, Refractive index, Plasma enhanced chemical vapor deposition, Interferometry, Silicon films, Thin film deposition, Integrated optics, Interferometers, Etching

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Proceedings Article | 15 April 2003 Paper

Micromachined fiber optic-to-Mach-Zehnder interferometer coupling via SiON channel waveguide

Andrei Sabac, Christophe Gorecki, Jean Jeannot, Lukasz Nieradko

Proceedings Volume 4943, (2003) https://doi.org/10.1117/12.468517

KEYWORDS: Chromium, Semiconducting wafers, Photomasks, Silicon, Optical lithography, Mach-Zehnder interferometers, Waveguides, Metals, Etching, Fiber optics

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Proceedings Article | 3 April 2003 Paper

Silicon oxynitride waveguides developed for optomechanical sensing functions

Lukasz Nieradko, Christophe Gorecki, Michal Jozwik, Andrei Sabac

Proceedings Volume 4944, (2003) https://doi.org/10.1117/12.468293

KEYWORDS: Waveguides, Silicon, Refractive index, Plasma enhanced chemical vapor deposition, Integrated optics, Microelectromechanical systems, Thin films, Modulation, Micromachining, Silica

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Proceedings Article | 25 March 2003 Paper

Interferometry system for the mechanical characterization of membranes with silicon oxynitride thin films fabricated by PECVD

Christophe Gorecki, Patrick Delobelle, Michal Jozwik, Andrei Sabac

Proceedings Volume 4945, (2003) https://doi.org/10.1117/12.468412

KEYWORDS: Thin films, Plasma enhanced chemical vapor deposition, Refractive index, Silicon, Interferometry, Silicon films, Plasma, Thin film deposition, Interferometers, Waveguides

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Proceedings Article | 29 July 2002 Paper

New challenges and approaches to interferometric MEMS and MOEMS testing

Christophe Gorecki, Malgorzata Kujawinska

Proceedings Volume 4900, (2002) https://doi.org/10.1117/12.484467

KEYWORDS: Waveguides, Interferometry, Interferometers, Microelectromechanical systems, Silicon, Microopto electromechanical systems, Refractive index, Beam splitters, Thin films, Glasses

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Proceedings Article | 19 April 2002 Paper

Optical interferometry investigation of internal stress and optomechanical characteristics of silicon-oxynitride thin films fabricated by PECVD

Andrei Sabac, Michal Jozwik, Christophe Gorecki

Proceedings Volume 4755, (2002) https://doi.org/10.1117/12.462881

KEYWORDS: Thin films, Plasma enhanced chemical vapor deposition, Silicon, Refractive index, Silicon films, Interferometry, Interferometers, Thin film deposition, Plasma, Optical interferometry

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Proceedings Article | 19 April 2002 Paper

Calculation of inductances and capacitances for 3D structures using Prony's method

Dagmar Peters, Sven Rehfuss, Christophe Gorecki, Claudia Marschner, Rainer Laur

Proceedings Volume 4755, (2002) https://doi.org/10.1117/12.462851

KEYWORDS: Inductance, Image segmentation, Capacitance, Magnetism, Error analysis, Matrices, Electromagnetic theory, Microelectronics, Communication and information technologies, Transformers

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Proceedings Article | 30 October 2001 Paper

Characterization of internal stress of silicon oxinitride thin films fabricated by plasma-enhanced chemical vapor deposition: applications in integrated optics

Seung Lee, Christophe Gorecki, Andrei Sabac, Michal Jozwik

Proceedings Volume 4596, (2001) https://doi.org/10.1117/12.447343

KEYWORDS: Thin films, Plasma enhanced chemical vapor deposition, Silicon, Refractive index, Silicon films, Waveguides, Hydrogen, Integrated optics, Plasma, Microopto electromechanical systems

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Proceedings Article | 23 October 2001 Paper

Fabrication of multilayer GaAlAs/GaAs microtips for VCSEL-based optical near-field sensors

Sabry Khalfallah, Christophe Gorecki

Proceedings Volume 4400, (2001) https://doi.org/10.1117/12.445593

KEYWORDS: Vertical cavity surface emitting lasers, Near field scanning optical microscopy, Sensors, Etching, Near field optics, Nanoprobes, Wet etching, Gallium arsenide, Nanolithography, Near field

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Proceedings Article | 23 October 2001 Paper

Waveguide microinterferometry system for microelements investigation

Christophe Gorecki, Leszek Salbut, Seung Lee, Michal Jozwik

Proceedings Volume 4400, (2001) https://doi.org/10.1117/12.445596

KEYWORDS: Waveguides, Diffraction gratings, Silicon, Refractive index, Interferometry, Interferometers, Thin films, Head, Beam splitters, Sensors

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Proceedings Article | 26 October 2000 Paper

VCSEL-based MOEMS architectures: from nanofabrication to environmental sensing ?

Christophe Gorecki

Proceedings Volume 4134, (2000) https://doi.org/10.1117/12.405341

KEYWORDS: Vertical cavity surface emitting lasers, Near field scanning optical microscopy, Reflectivity, Near field optics, Gallium arsenide, Reflectors, Sensors, Modulation, Etching, Semiconductor lasers

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Proceedings Article | 29 September 2000 Paper

Fabrication by wet etching of multilayer GaAIAs/GaAs microtips for SNOM applications

Hideki Kawakatsu, Sabry Khalfallah, Yasuhiko Arakawa, Christophe Gorecki

Proceedings Volume 4098, (2000) https://doi.org/10.1117/12.401622

KEYWORDS: Near field scanning optical microscopy, Vertical cavity surface emitting lasers, Etching, Wet etching, Sensors, Nanoprobes, Gallium arsenide, Nanolithography, Fabrication, Signal detection

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Proceedings Article | 15 September 1999 Paper

Preparation of oxinitride optical waveguides with piezoelectric modulation fabricated by silicon micromachining

Christophe Gorecki

Proceedings Volume 3825, (1999) https://doi.org/10.1117/12.364302

KEYWORDS: Silicon, Waveguides, Plasma enhanced chemical vapor deposition, Refractive index, Thin films, Transducers, Zinc oxide, Silicon films, Low pressure chemical vapor deposition, Modulation

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Proceedings Article | 22 June 1998 Paper

Silicon-based integrated Mach-Zehnder interferometer with acousto-optic modulation: a biosensor application

Hideki Kawakatsu, Eric Bonnotte, Kerstin Woerhoff, Christophe Gorecki

Proceedings Volume 3419, 34191E (1998) https://doi.org/10.1117/12.311037

KEYWORDS: Silicon, Mach-Zehnder interferometers, Biosensors, Acousto-optics, Modulation, Integrated optics, Zinc oxide, Thin film devices, Thin films, Transducers

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SPIE Journal Paper | 1 March 1998

Optoelectronic implementation of adaptive image preprocessing using hybrid modulations of Epson liquid crystal television: applications to smoothing and edge enhancement

Christophe Gorecki, Bertrand Trolard

OE, Vol. 37, Issue 03, (March 1998) https://doi.org/10.1117/12.10.1117/1.601926

KEYWORDS: Optical filters, Image enhancement, Image filtering, Optoelectronics, Modulation, Spatial frequencies, Optical correlators, Gaussian filters, Liquid crystals, Linear filtering

Proceedings Article | 14 November 1997 Paper

Silicon-based interferometric sensor with phase modulation driven by surface acoustic waves

Eric Bonnotte, Hideki Kawakatsu, Christophe Gorecki, Hiroshi Toshiyoshi

Proceedings Volume 3242, (1997) https://doi.org/10.1117/12.293553

KEYWORDS: Silicon, Acoustics, Waveguides, Phase modulation, Refractive index, Zinc oxide, Silicon films, Sensors, Integrated optics, Thin films

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Proceedings Article | 17 September 1997 Paper

Original approach to an optically active silicon-based interferometric structure for sensing applications

Fred Benoit, Christophe Gorecki, Hideki Kawakatsu, Hiroyuki Fujita, Hiroshi Toshioshi, Eric Bonnotte

Proceedings Volume 3098, (1997) https://doi.org/10.1117/12.281184

KEYWORDS: Waveguides, Transducers, Electrodes, Zinc oxide, Thin films, Acoustics, Phase modulation, Refractive index, Sensors, Silicon

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Proceedings Article | 11 April 1997 Paper

Novel architecture for silicon-based integrated interferometer with phase modulation by elasto-optic effect

Christophe Gorecki, Hideki Kawakatsu, Franck Chollet

Proceedings Volume 3008, (1997) https://doi.org/10.1117/12.271410

KEYWORDS: Waveguides, Silicon, Transducers, Phase modulation, Acoustics, Interferometers, Thin films, Zinc oxide, Integrated optics, Semiconductor lasers

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Proceedings Article | 18 September 1996 Paper

Remote control in-plane displacement measurement system

Anna Kozlowska, Christophe Gorecki, Malgorzata Kujawinska

Proceedings Volume 2782, (1996) https://doi.org/10.1117/12.250750

KEYWORDS: Control systems, Interferometers, Fiber optics, Optoelectronics, Semiconductor lasers

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Proceedings Article | 26 August 1996 Paper

Analysis and tracking of destructive tests on working turbo fans involving image processing techniques

Christophe Gorecki, Luc Oriat, Marie-Laurence Meyer, Jean-Louis Eyraud, Daniel Charraut

Proceedings Volume 2785, (1996) https://doi.org/10.1117/12.248535

KEYWORDS: Image processing, Binary data, Image restoration, Mathematical modeling, Composites, High speed cameras, Fluctuations and noise, Scanners, Mathematical morphology, Edge detection

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Proceedings Article | 17 July 1996 Paper

Speckle noise removal in interference fringes by optoelectronic preprocessing with Epson liquid crystal television

Gilbert Tribillon, Bertrand Trolard, Christophe Gorecki

Proceedings Volume 2860, (1996) https://doi.org/10.1117/12.276298

KEYWORDS: Optical filters, Speckle, Liquid crystals, Modulation, Phase shift keying, Diffraction, Optical correlators, Televisions, Convolution, Spatial filters

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Proceedings Article | 17 July 1996 Paper

Influence of the spectral properties of a wavelength-modulated laser diode on the resulting interferogram

Anna Kozlowska, Christophe Gorecki

Proceedings Volume 2860, (1996) https://doi.org/10.1117/12.276311

KEYWORDS: Semiconductor lasers, Diodes, Modulation, Visibility, Interferometry, Light sources, Diffraction gratings, Visualization, Fiber optics, Semiconductors

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SPIE Journal Paper | 1 December 1995

Comparison of computer-generated holograms produced by laser printers and lithography: application to pattern recognition

Ignacio Moreno, Christophe Gorecki, Juan Campos Rubio, Maria Yzuel

OE, Vol. 34, Issue 12, (December 1995) https://doi.org/10.1117/12.10.1117/12.215513

KEYWORDS: Lithography, Holograms, Nonimpact printing, Photomasks, Computer generated holography, Printing, Pattern recognition, Quantization, Optical filters, Binary data

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Proceedings Article | 14 June 1995 Paper

Speckle noise removal in interference patterns by cross absolute filter: comparison with median filter

Christophe Gorecki, Jacek Mandziuk

Proceedings Volume 2544, (1995) https://doi.org/10.1117/12.212150

KEYWORDS: Digital filtering, Speckle, Nonlinear filtering, Speckle pattern, Linear filtering, Single mode fibers, Computer simulations, Electronic filtering, Interferometry, Optical filters

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Proceedings Article | 19 January 1995 Paper

Correlation methods in polychromatic objects recognition: application of lithographic filters

Maria Yzuel, Ignacio Moreno, Esmail Ahouzi, Montserrat Corbalan-Fuertes, F. Turon, Maria Millan Garcia-Verela, Christophe Gorecki, Juan Campos Rubio

Proceedings Volume 2363, (1995) https://doi.org/10.1117/12.199635

KEYWORDS: Phase only filters, Optical filters, Lithography, Image processing, Optimal filtering, Pattern recognition, CCD cameras, Optical correlators, Object recognition, Image filtering

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Proceedings Article | 12 December 1994 Paper

Multifunction wavelength-shift interferometry: absolute distance and velocity measurements

Christophe Gorecki, Gilbert Tribillon, A. Chebbour

Proceedings Volume 2340, (1994) https://doi.org/10.1117/12.195932

KEYWORDS: Semiconductor lasers, Distance measurement, Modulation, Interferometers, Interferometry, Michelson interferometers, Retroreflectors, Velocity measurements, Beam splitters, Mirrors

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Proceedings Article | 15 November 1994 Paper

Absolute distance and velocity measurements by a double integrated heterodyne interferometer

Gilbert Tribillon, Christophe Gorecki, A. Chebbour

Proceedings Volume 2248, (1994) https://doi.org/10.1117/12.194319

KEYWORDS: Interferometers, Distance measurement, Velocity measurements, Semiconductor lasers, Heterodyning, Mirrors, Calibration, Sensors, Refractive index, Modulation

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Proceedings Article | 31 October 1994 Paper

Phase correlation method for speckle in-plane motion analysis using digitally addressed SLM

Christophe Gorecki

Proceedings Volume 1991, (1994) https://doi.org/10.1117/12.192019

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Proceedings Article | 29 September 1994 Paper

Real-time quantized phase-only filters generation on Epson liquid crystal TV

Ignacio Moreno, Maria Yzuel, Katarzyna Chalasinska-Macukow, Juan Campos Rubio, Christophe Gorecki

Proceedings Volume 2297, (1994) https://doi.org/10.1117/12.187275

KEYWORDS: Liquid crystals, Phase only filters, Phase modulation, Computer generated holography, Spatial light modulators, Holograms, Phase shift keying, Lithography, Optical correlators, Chlorine

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Proceedings Article | 23 July 1993 Paper

Real-time speckle displacement measurement employing SLM-based phase correlator

C. Gorecki

Proceedings Volume 1983, 19838E (1993) https://doi.org/10.1117/12.2308721

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Proceedings Article | 15 February 1993 Paper

All-fiber heterodyne interferometer for vibration measurements in audible frequency range

Michel Spajer, Christophe Gorecki, Tijani Gharbi

Proceedings Volume 1756, (1993) https://doi.org/10.1117/12.140801

KEYWORDS: Interferometry, Heterodyning, Interferometers, Calibration, Modulation, Fourier transforms, Polarization, Ferroelectric materials, Vibrometry, Ear

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Proceedings Article | 12 January 1993 Paper

Optoelectronic implementation of quasi phase-correlation-based processor

Christophe Gorecki, Corinne Bournizien, Katarzyna Chalasinska-Macukow

Proceedings Volume 1772, (1993) https://doi.org/10.1117/12.140934

KEYWORDS: Optical correlators, Joint transforms, Distortion, Signal to noise ratio, Optoelectronics, Nonlinear filtering, Fourier transforms, Computer simulations, Liquid crystals, Tolerancing

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SPIE Journal Paper | 1 December 1991

Rough surface classification by optical generation of irradiance moments computed from the Hartley transform

Christophe Gorecki

OE, Vol. 30, Issue 12, (December 1991) https://doi.org/10.1117/12.10.1117/12.56015

KEYWORDS: Beam splitters, Interferometers, Fourier transforms, Sensors, Charge-coupled devices, Polarizers, Error analysis, Data processing, Geometrical optics, Statistical analysis

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Proceedings Article | 1 August 1990 Paper

Optical classification of metal-milled samples using Fourier spectrum sampling

Christophe Gorecki

Proceedings Volume 1265, (1990) https://doi.org/10.1117/12.20249

KEYWORDS: Sensors, Inspection, Metals, Statistical analysis, Fourier transforms, Spatial frequencies, Computing systems, Photomicroscopy, Speckle, Light scattering

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Showing 5 of 96 publications

Proceedings Volume Editor (23)

SPIE Conference Volume | 9 August 2018

Optical Micro- and Nanometrology VII

SPIE Conference Volume | 6 June 2016

Optical Micro- and Nanometrology VI

SPIE Conference Volume | 16 July 2014

Interferometry XVII: Advanced Applications

SPIE Conference Volume | 29 May 2014

Optical Micro- and Nanometrology V

SPIE Conference Volume | 13 September 2012

Interferometry XVI: Applications

Showing 5 of 23 publications

Conference Committee Involvement (35)

Optical Measurement Systems for Industrial Inspection XII

21 June 2021 | Online Only, Germany

Optical Measurement Systems for Industrial Inspection XI

24 June 2019 | Munich, Germany