We present a sensor fabricated with MEMS (Micro-Electro-Mechanical Systems) technology that quickly
measures fluid density and viscosity. This sensor is fabricated inside of a microfluidic channel through which
the fluid to be measured passes. The operational principal involves the influence of the fluid on the
resonance frequency and quality factor of a vibrating plate oscillating normal to its plane. By performing
measurements in liquids we have demonstrated operability in fluids with densities between (0.6 to 1.5) g/cc
and viscosities between (0.4 to 100) cP. Such measurements are required to determine the economic
feasibility of recovering hydrocarbon from subterranean strata. There are numerous examples in the
literature of sensors fabricated by the methods of MEMS that are claimed to measure both density and
viscosity of fluids, but in most cases, the accuracy of such sensors is not been demonstrated in a wide range of
fluids and moreover, their use in non-laboratory environments has not been proven.1,2,3 Here we show that it
is possible to design and package a sensor that can function with high accuracy in extreme environments
while providing useful information.
We present a sensor fabricated with MEMS (Micro-Electro-Mechanical Systems) technology that upon immersion quickly measures fluid density and viscosity. The operational principal involves the influence of the fluid on the resonance frequency and quality factor of a vibrating plate oscillating normal to its plane. By performing measurements in liquids over a wide range of temperature (20 to 150 C) and pressure (0.1 to 75 MPa), we have demonstrated a maximum inaccuracy in our density and viscosity measurements of approximately +/- 1.5 % and +/- 10 % respectively, for fluids with densities between (0.6 to 1.5) g/cc and viscosities between (0.4 to 100) cP. Such measurements are required to determine the economic feasibility of recovering hydrocarbon from subterranean strata. There are numerous examples in the literature of sensors fabricated by the methods of MEMS that are claimed to measure both density and viscosity of fluids, but in most cases, the accuracy of such sensors is not been demonstrated in a wide range of fluids and moreover, their use in non-laboratory environments has not been proven.1,2,3 Here we show that it is possible to design and package a sensor that can function with high accuracy in extreme environments while providing useful information.
Conference Committee Involvement (8)
Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS, Nanodevices, and Nanomaterials XIII
3 February 2014 | San Francisco, California, United States
Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS and Nanodevices XII
4 February 2013 | San Francisco, California, United States
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI
23 January 2012 | San Francisco, California, United States
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices X
24 January 2011 | San Francisco, California, United States
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX
25 January 2010 | San Francisco, California, United States
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices VIII
28 January 2009 | San Jose, California, United States
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII
21 January 2008 | San Jose, California, United States
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI
23 January 2007 | San Jose, California, United States
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