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Chun-Chen Yeh
at Taiwan Semiconductor Mfg Co
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Publications (1)
Proceedings Article | 2 April 2004 Paper
Identification and elimination of trench crystal defects in sub-0.13-um era
Chun-Chen Yeh, Chung-Chen Chen, Tser-Hua Lu, Chia-Ming Shen, Jong-Hsian Chuang, Jon Lee, Chiang Fu, Ya-Dien Sheu
Proceedings Volume 5276, (2004) https://doi.org/10.1117/12.521724
KEYWORDS: Crystals, Failure analysis, Transmission electron microscopy, Atomic force microscopy, Image processing, Oxides, Scanning electron microscopy, Data acquisition, Crystallography, Oxidation
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