Mr. Chung-Shin Kang Profile

Chung-Shin Kang

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Publications (2)

Proceedings Article | 20 May 2006 Paper

Simultaneous layout, process, and model optimization within an integrated design-for-yield environment

Dmitri Lapanik, Lynn Cai, Chung-Shin Kang, Bob Naber, Jason Sweis, Wolf Staud

Proc. SPIE. 6283, Photomask and Next-Generation Lithography Mask Technology XIII

KEYWORDS: Calibration, Image processing, Manufacturing, Photomasks, Optical proximity correction, Optimization (mathematics), Semiconducting wafers, Systems modeling, Process modeling, Resolution enhancement technologies

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Proceedings Article | 10 July 2003 Paper

PsmLint: bringing AltPSM benefits to the IC design stage

Pradiptya Ghosh, Chung-Shin Kang, Michael Sanie, Judy Huckabay

Proc. SPIE. 5042, Design and Process Integration for Microelectronic Manufacturing

KEYWORDS: Lithography, Manufacturing, Photomasks, Optical proximity correction, Computer aided design, Integrated circuit design, Optics manufacturing, Resolution enhancement technologies, Phase shifts, Design for manufacturability

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