Dr. Ci Song Profile

Dr. Ci Song

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 11 January 2019 Paper

Research on combined surface modification of single crystal silicon cylindrical mirror

Wanli Zhang, Feng Shi, Yifan Dai, Ci Song, Ye Tian

Proceedings Volume 10837, 1083717 (2019) https://doi.org/10.1117/12.2504844

KEYWORDS: Polishing, Mirrors, Surface finishing, Silicon, Crystals, Ion beam finishing, Ion beams, Particles, Photovoltaics, Liquids

Read Abstract +

This article introduces the modification of single crystal silicon cylindrical mirror that combined immersed CCOS polishing with IBF polishing. In the processing of smoothing and modifying, the quality of the mirror’s surface has been further improved. In this experiment, we optimize the CCOS polishing process and improve the traditional CCOS polishing apparatus to polish the single crystal silicon convex cylindrical mirror. During the CCOS polishing process, the parameter were set as follows: pressure 0.4kPa, speed 25 r/min, polishing liquid concentration 4.5% (pH 10), polishing time 20 min. After polishing by CCOS, IBF is used on its heels. The parameter were set as follows: energy 1000-1200eV (Ar⁺ ion beam with low energy), incident angle of ion beam 90°, polishing time 30 min. The immersed CCOS polishing process and IBF polishing process iterated repeatedly until the surface quality of the single crystal silicon convex cylindrical mirror meets the requirement. After the polishing process, the sub aperture stitching method and Zygo interferometer are used to detect the surface. The PV value of the single crystal silicon convex cylindrical mirror is 0.265 lambda, the roughness is 0.679nm the residual Zernike is 70.5 nm after testing. The errors over the whole frequency band were significantly reduced. It could be seen from the above that the single crystal silicon convex cylindrical mirror had high accuracy and better profile on the surface after polishing process. The error over the whole frequency band also converged obviously. Therefore, the method that had been described in this paper could be used for the surface modification of single crystal silicon cylindrical mirror.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years