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Dr. Cihan Tinaztepe
Director of Engineering at KLA Corp
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Publications (1)
Proceedings Article | 5 September 2001 Paper
Simulation-based defect printability analysis for 0.13-um technology
Cihan Tinaztepe, Ichiro Kagami
Proceedings Volume 4409, (2001) https://doi.org/10.1117/12.438363
KEYWORDS: Photomasks, Semiconducting wafers, Reticles, Inspection, Airborne remote sensing, Binary data, Optical testing, Calibration, Image processing software, Metrology
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