Claudia Bruchmann
at Fraunhofer-IOF
SPIE Involvement:
Author
Publications (6)

Proceedings Article | 16 February 2012 Paper
Proc. SPIE. 8253, MEMS Adaptive Optics VI
KEYWORDS: Actuators, Mirrors, High power lasers, Copper, Manufacturing, Deformable mirrors, Chemical elements, Mirror mounts, Temperature metrology, Absorption

Proceedings Article | 15 February 2011 Paper
Proc. SPIE. 7926, Micromachining and Microfabrication Process Technology XVI
KEYWORDS: Actuators, Etching, Electrodes, Polymers, Ultraviolet radiation, Silicon, Finite element methods, Optical simulations, Semiconducting wafers, Polymeric actuators

Proceedings Article | 18 February 2010 Paper
Proc. SPIE. 7595, MEMS Adaptive Optics IV
KEYWORDS: Actuators, Gold, Mirrors, Ferroelectric materials, Electrodes, Copper, Ceramics, Manufacturing, Deformable mirrors, Printing

Proceedings Article | 24 February 2009 Paper
Proc. SPIE. 7209, MEMS Adaptive Optics III
KEYWORDS: Actuators, Mirrors, Ferroelectric materials, Electrodes, Copper, Ceramics, Reflectivity, Deformable mirrors, Printing, Photonic integrated circuits

Proceedings Article | 15 May 2007 Paper
Proc. SPIE. 6589, Smart Sensors, Actuators, and MEMS III
KEYWORDS: Actuators, Ferroelectric materials, Electrodes, Semiconductor lasers, Printing, Solids, Finite element methods, Diodes, Aluminum, Fiber couplers

Showing 5 of 6 publications
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