Clemens T. Mueller-Falcke
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 25 October 2004 Paper
Proceedings Volume 5604, (2004) https://doi.org/10.1117/12.571273
KEYWORDS: Actuators, Atomic force microscopy, Sensors, Carbon nanotubes, Scanning probe microscopy, Image resolution, Microscopes, Microelectromechanical systems, Manufacturing, Nanolithography

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