Prof. Clivia M. Sotomayor-Torres
ICREA Research Professor at ICN2
SPIE Involvement:
Publications (36)

Proceedings Article | 24 March 2020 Presentation
Proc. SPIE. 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV
KEYWORDS: Nanostructures, Metrology, Error analysis, Materials processing, Feature extraction, Atomic force microscopy, Scanning electron microscopy, 3D metrology, Process control, Nanoimprint lithography

Proceedings Article | 26 March 2019 Paper
Proc. SPIE. 10958, Novel Patterning Technologies for Semiconductors, MEMS/NEMS, and MOEMS 2019
KEYWORDS: Modeling, Metrology, Statistical analysis, Computational modeling, Image segmentation, Image processing, Image acquisition, Computer simulations, Scanning electron microscopy, Nanoimprint lithography, Defect inspection

Proceedings Article | 8 March 2019 Presentation
Proc. SPIE. 10927, Photonic and Phononic Properties of Engineered Nanostructures IX
KEYWORDS: Optomechanical design, Transparency, Oscillators, Photons, Crystals, Photonic crystals, Phonons, Silicon photonics, Nonlinear crystals, Chaos

Proceedings Article | 24 September 2015 Paper
Proc. SPIE. 9628, Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V
KEYWORDS: Nanostructures, Electron beam lithography, Diffraction, Optical design, Metrology, Polymers, Scanning electron microscopy, Critical dimension metrology, Polymer thin films, Diffraction gratings

Proceedings Article | 27 March 2015 Paper
Proc. SPIE. 9423, Alternative Lithographic Technologies VII
KEYWORDS: Lithography, Statistical analysis, Error analysis, Silicon, Image analysis, Scanning electron microscopy, Dimensional metrology, Directed self assembly, Optical alignment, Imaging arrays

Showing 5 of 36 publications
Proceedings Volume Editor (1)

SPIE Conference Volume | 15 September 2004

Conference Committee Involvement (3)
14 April 2014 | Brussels, Belgium
16 April 2012 | Brussels, Belgium
Photonic Crystal Materials and Nanostructures
27 April 2004 | Strasbourg, France
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