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Bin Cong
at No.91 Element of Unit 92941 CPLA
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Publications (2)
Proceedings Article | 13 April 2015 Paper
Simulation of surface deformation for the lithographic object lens by Zernike polynomials
Bin Cong, Tong Sheng Yi
Proceedings Volume 9522, 952206 (2015) https://doi.org/10.1117/12.2175664
KEYWORDS: Lithography, Zernike polynomials, Wavefront aberrations, Data modeling, Manufacturing, Wavefronts, Distortion, 193nm lithography, Optical design, Optical testing
Proceedings Article | 13 April 2015 Paper
Design of an infrared four-mirror optical system with large relative aperture
Bin Cong, Zheng Wu
Proceedings Volume 9522, 952205 (2015) https://doi.org/10.1117/12.2175662
KEYWORDS: Infrared imaging, Infrared radiation, Mirrors, Modulation transfer functions, Imaging systems, Reflectivity, Image quality, Distortion, Optical design, Sensors
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