Mr. Craig L. Ghelli Profile

Craig L. Ghelli

Outside Services Engineer

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Publications (3)

Proceedings Article | 4 May 2005 Paper

Advanced rinse process alternatives for reduction of photolithography development cycle defects

Nickolas Brakensiek, Peng Zhang, Danielle King, Craig Ghelli

Proceedings Volume 5753, (2005) https://doi.org/10.1117/12.598819

KEYWORDS: Semiconducting wafers, Diffractive optical elements, Photoresist materials, Photoresist developing, Particles, Optical lithography, Coating, Control systems, Liquids, Wafer testing

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Proceedings Article | 12 June 2003 Paper

Developer soluble organic BARCs for KrF lithography

Chris Cox, Darron Dippel, Craig Ghelli, Pasquale Valerio, William Simmons, Alice Guerrero

Proceedings Volume 5039, (2003) https://doi.org/10.1117/12.483708

KEYWORDS: Photoresist developing, Photoresist materials, Etching, Plasma etching, Semiconducting wafers, Lithography, Plasma, Optical lithography, Scanning electron microscopy, Dry etching

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Proceedings Article | 25 June 1999 Paper

Advanced negative i-line resist development on metal surfaces for next-generation lithography mask fabrication

Craig Ghelli, David Mancini, Douglas Resnick, Pawitter Mangat, William Dauksher

Proceedings Volume 3676, (1999) https://doi.org/10.1117/12.351117

KEYWORDS: Metals, Extreme ultraviolet lithography, Antireflective coatings, Silicon, Lithography, Charged-particle lithography, Mask making, Photomasks, Semiconducting wafers, Scanning electron microscopy

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