Dr. Curtis L. Rettig
Principal Scientist
SPIE Involvement:
Author
Publications (6)

Proceedings Article | 24 March 2006 Paper
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Optical amplifiers, Oscillators, High power lasers, Laser applications, Gas lasers, Extreme ultraviolet, Excimer lasers, Molybdenum, Neodymium lasers, Carbon monoxide

Proceedings Article | 23 March 2006 Paper
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Mirrors, Metrology, Lithium, Ions, Reflectivity, Extreme ultraviolet, Extreme ultraviolet lithography, Prototyping, Plasma, Tin

Proceedings Article | 6 May 2005 Paper
Proc. SPIE. 5751, Emerging Lithographic Technologies IX
KEYWORDS: Mirrors, Lithium, Ions, Diffusion, Reflectivity, Extreme ultraviolet, Extreme ultraviolet lithography, EUV optics, Plasma, Tin

Proceedings Article | 6 May 2005 Paper
Proc. SPIE. 5751, Emerging Lithographic Technologies IX
KEYWORDS: Atomic, molecular, and optical physics, Opacity, Electrons, Ions, Ionization, Optical simulations, Extreme ultraviolet lithography, Pulsed laser operation, Plasma, Tin

Proceedings Article | 20 May 2004 Paper
Proc. SPIE. 5374, Emerging Lithographic Technologies VIII
KEYWORDS: Carbon, Light sources, Contamination, Electrodes, Magnetism, Xenon, Extreme ultraviolet, Extreme ultraviolet lithography, Plasma, Tin

Showing 5 of 6 publications
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