Dr. D. Laurence Meixner
Director of R & D at Teledyne Scientific
SPIE Involvement:
Author
Publications (8)

SPIE Journal Paper | 1 July 2004
JM3 Vol. 3 Issue 03
KEYWORDS: Silica, Pellicles, Aluminum, Sol-gels, Adsorption, Lithography, Nitrogen, Deep ultraviolet, Photomasks, Bioalcohols

Proceedings Article | 17 December 2003 Paper
Proc. SPIE. 5256, 23rd Annual BACUS Symposium on Photomask Technology
KEYWORDS: Lithography, Silica, Birefringence, Glasses, Ultraviolet radiation, Photomasks, Sol-gels, Chlorine, Fluorine, Oxidation

Proceedings Article | 17 December 2003 Paper
Proc. SPIE. 5256, 23rd Annual BACUS Symposium on Photomask Technology
KEYWORDS: Silica, Quartz, Nitrogen, Bioalcohols, Pellicles, Adsorption, Photomasks, Aluminum, Sol-gels, Contamination control

SPIE Journal Paper | 1 July 2003
JM3 Vol. 2 Issue 03
KEYWORDS: Sol-gels, Photomasks, Glasses, Silica, Deep ultraviolet, Birefringence, Manufacturing, Lithography, Polishing, Ultraviolet radiation

Proceedings Article | 26 June 2003 Paper
Proc. SPIE. 5040, Optical Microlithography XVI
KEYWORDS: Polishing, Optical lithography, Deep ultraviolet, Silica, Birefringence, Glasses, Manufacturing, Photomasks, Sol-gels, Fluorine

Showing 5 of 8 publications
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