Mr. Da Song Profile

Da Song

Graduate Research Assistant at SUNY/Univ at Albany

SPIE Involvement:

Author

Publications (5)

Proceedings Article | 18 March 2016 Paper

Optical metrology solutions for 10nm films process control challenges

Sridhar Mahendrakar, Alok Vaid, Kartik Venkataraman, Michael Lenahan, Steven Seipp, Fang Fang, Shweta Saxena, Dawei Hu, Nam Hee Yoon, Da Song, Janay Camp, Zhou Ren

Proceedings Volume 9778, 97780Z (2016) https://doi.org/10.1117/12.2220462

KEYWORDS: Metrology, Process control, Metals, Transistors, Dielectrics, X-ray optics, Tolerancing, Thin films, Control systems, 3D acquisition, Semiconducting wafers, Germanium, Lamps, Silicon, Light sources, 3D metrology

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SPIE Journal Paper | 1 April 2008

New approaches for chip-to-chip interconnects: integrating porous silicon with MOEMS

Da Song, Natalya Tokranova, Alison Gracias, James Castracane

JM3, Vol. 7, Issue 02, 021013, (April 2008) https://doi.org/10.1117/12.10.1117/1.2909279

KEYWORDS: Diffractive optical elements, Silicon, Actuators, Mirrors, Multilayers, Optical components, Scanning electron microscopy, Diffraction, Microopto electromechanical systems, Electrochemical etching

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Proceedings Article | 9 February 2008 Paper

A porous silicon thermally tunable optical filter

Da Song, Natalya Tokranova, Alison Gracias, James Castracane

Proceedings Volume 6887, 68870C (2008) https://doi.org/10.1117/12.759165

KEYWORDS: Actuators, Silicon, Optical filters, Reflectivity, Microopto electromechanical systems, Electrochemical etching, Optical components, Etching, Semiconducting wafers, Refractive index

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Proceedings Article | 9 February 2007 Paper

Active silicon components for chip to chip interconnects

James Castracane, Natalya Tokranova, Da Song

Proceedings Volume 6477, 647704 (2007) https://doi.org/10.1117/12.699136

KEYWORDS: Silicon, Optical filters, Beam steering, Prototyping, Optical components, Sensors, Microopto electromechanical systems, Microelectromechanical systems, Electrochemical etching, Reflectivity

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Proceedings Article | 6 February 2007 Paper

Porous silicon 2D photonic crystals

Natalya Tokranova, Da Song, Alison Gracias, James Castracane

Proceedings Volume 6480, 64800T (2007) https://doi.org/10.1117/12.699127

KEYWORDS: Silicon, Photonic crystals, Photoresist materials, Photomasks, Diffraction, Etching, Refractive index, Silicon photonics, Optical components, Optical properties

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