Dr. Daehoon Han Profile

Dr. Daehoon Han

at SAMSUNG Electronics Co Ltd

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Author

Publications (2)

Proceedings Article | 27 April 2023 Presentation + Paper

Mueller matrix metrology with multi-angle information using multiple self-interference

Garam Choi, Jinyong Kim, Daehoon Han, Young-Uk Jin, Soonhong Hwang, Jinseob Kim, Wookrae Kim, Jaehwang Jung, Seungwoo Lee, Taejoong Kim, Jinwoo Ahn, Myungjun Lee, Gideok Kim, Su-Young Lee, Yusin Yang

Proceedings Volume 12496, 1249610 (2023) https://doi.org/10.1117/12.2657852

KEYWORDS: Mueller matrices, Line edge roughness, Polarization, Metrology, Simulations, Critical dimension metrology, Holograms, Ellipsometry, Holography

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SPIE Journal Paper | 20 April 2022 Open Access

Toward realization of high-throughput hyperspectral imaging technique for semiconductor device metrology

Changhyeong Yoon, Gwangsik Park, Daehoon Han, Sang-il Im, Sungmin Jo, Jinseob Kim, Wookrae Kim, Changhoon Choi, Myungjun Lee

JM3, Vol. 21, Issue 02, 021209, (April 2022) https://doi.org/10.1117/12.10.1117/1.JMM.21.2.021209

KEYWORDS: Semiconducting wafers, Cameras, Critical dimension metrology, Semiconductors, Spectral resolution, Spatial resolution, Hyperspectral imaging, Imaging systems, Metrology, Wafer-level optics

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