Daniel Sarlette
Senior Technical Director Lithography at Infineon Technologies
SPIE Involvement:
Conference Program Committee | Author
Publications (6)

Proceedings Article | 12 April 2013 Paper
Proc. SPIE. 8683, Optical Microlithography XXVI
KEYWORDS: Etching, Oxides, Photoresist materials, Photomasks, Semiconducting wafers, Reactive ion etching, Grayscale lithography, Lithography, Ions, Atomic force microscopy

Proceedings Article | 29 March 2013 Paper
Proc. SPIE. 8683, Optical Microlithography XXVI
KEYWORDS: Photomasks, Grayscale lithography, Lithography, Doping, Silicon, Ion implantation, Photoresist processing, Ions, Semiconducting wafers, Optical lithography

Proceedings Article | 20 April 2011 Paper
Proc. SPIE. 7971, Metrology, Inspection, and Process Control for Microlithography XXV
KEYWORDS: Etching, Contamination, Metals, Lithography, Reliability, Dielectric filters, Semiconducting wafers, Particles, Bottom antireflective coatings, Dielectrics

Proceedings Article | 23 March 2011 Paper
Proc. SPIE. 7973, Optical Microlithography XXIV
KEYWORDS: Optical proximity correction, Source mask optimization, Scanners, Lithography, Photomasks, Manufacturing, Photovoltaics, Fiber optic illuminators, Reticles, Resolution enhancement technologies

Proceedings Article | 4 March 2010 Paper
Proc. SPIE. 7640, Optical Microlithography XXIII
KEYWORDS: Resolution enhancement technologies, Lithography, Optical proximity correction, Semiconducting wafers, Image processing, 193nm lithography, Chemical reactions, Scanners, Etching, Design for manufacturing

Showing 5 of 6 publications
Conference Committee Involvement (7)
Optical Lithography XXXIV
22 February 2021 | Online Only, California, United States
Optical Microlithography XXXIII
25 February 2020 | San Jose, California, United States
Optical Microlithography XXXII
26 February 2019 | San Jose, California, United States
Optical Microlithography XXXI
27 February 2018 | San Jose, California, United States
Optical Microlithography XXX
28 February 2017 | San Jose, California, United States
Showing 5 of 7 Conference Committees
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