Dr. Daniel F. Sunday
at National Institute of Standards and Technology
SPIE Involvement:
Author
Publications (13)

Proceedings Article | 20 March 2020 Paper
Proc. SPIE. 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV
KEYWORDS: Nanostructures, Diffraction, Metrology, Data modeling, Scattering, Etching, X-rays, Field effect transistors, Critical dimension metrology, X-ray characterization

SPIE Journal Paper | 3 November 2018
JM3 Vol. 17 Issue 04
KEYWORDS: Scattering, Nanostructures, X-rays, Silicon, Semiconductors, System on a chip, Time metrology, Laser scattering, Visualization, Computer simulations

Proceedings Article | 19 March 2018 Presentation
Proc. SPIE. 10586, Advances in Patterning Materials and Processes XXXV
KEYWORDS: Optical lithography, 3D acquisition, Scattering, Etching, X-rays, 3D modeling, Directed self assembly, Integrated circuits

Proceedings Article | 13 March 2018 Presentation + Paper
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Nanostructures, Metrology, Genetic algorithms, Scattering, X-rays, Grazing incidence

Proceedings Article | 25 May 2017 Presentation
Proc. SPIE. 10146, Advances in Patterning Materials and Processes XXXIV
KEYWORDS: Thin films, Electron beam lithography, Scattering, Polymers, X-rays, Interfaces, Reflectivity, Extreme ultraviolet, Directed self assembly, Standards development

Showing 5 of 13 publications
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