Dr. Danilo De Simone
Principal Member of Technical Staff at imec
SPIE Involvement:
Conference Program Committee | Editorial Board Member: Journal of Micro/Nanolithography, MEMS, and MOEMS | Editorial Board Member: Journal of Micro/Nanopatterning, Materials, and Metrology | Author
Publications (54)

Proceedings Article | 13 October 2020 Presentation + Paper
Proc. SPIE. 11517, Extreme Ultraviolet Lithography 2020
KEYWORDS: Extreme ultraviolet lithography, Photoresist materials, Photoresist developing, Lithography, Stochastic processes, Printing, Extreme ultraviolet, Electron beam lithography, Line edge roughness, Polymers

Proceedings Article | 20 September 2020 Presentation
Proc. SPIE. 11517, Extreme Ultraviolet Lithography 2020
KEYWORDS: Stochastic processes, Extreme ultraviolet, Extreme ultraviolet lithography, Edge detection, Lithography, Critical dimension metrology, Scanning electron microscopy, Metrology, Optical lithography, Printing

Proceedings Article | 14 April 2020 Presentation + Paper
Proc. SPIE. 11323, Extreme Ultraviolet (EUV) Lithography XI
KEYWORDS: Line width roughness, Photoresist materials, Photons, Scanners, Lithography, Line edge roughness, Convolution, Extreme ultraviolet lithography, Extreme ultraviolet, Stochastic processes

Proceedings Article | 30 March 2020 Presentation + Paper
Proc. SPIE. 11326, Advances in Patterning Materials and Processes XXXVII
KEYWORDS: Stochastic processes, Ultraviolet radiation, Extreme ultraviolet lithography, Photoresist processing, Extreme ultraviolet, Optical lithography, Absorption

Proceedings Article | 23 March 2020 Presentation + Paper
Proc. SPIE. 11326, Advances in Patterning Materials and Processes XXXVII
KEYWORDS: Photoresist materials, Extreme ultraviolet lithography, Lithography, Stochastic processes, Line width roughness, Extreme ultraviolet, Optical lithography, Photoresist developing

Showing 5 of 54 publications
Conference Committee Involvement (4)
Advances in Patterning Materials and Processes XXXVIII
22 February 2021 | Online Only, California, United States
Advances in Patterning Materials and Processes XXXVII
24 February 2020 | San Jose, California, United States
Advances in Patterning Materials and Processes XXXVI
25 February 2019 | San Jose, California, United States
Advances in Patterning Materials and Processes XXXV
27 February 2018 | San Jose, California, United States
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