Prof. Dapeng Chen
Head of CMOS/MEMS Dept. at Institute of Microelectronics
SPIE Involvement:
Author
Publications (6)

SPIE Journal Paper | 1 October 2008
JM3 Vol. 7 Issue 04
KEYWORDS: Sensors, Silicon, Resistors, Etching, Resistance, Platinum, Titanium, Low pressure chemical vapor deposition, Infrared sensors, Temperature metrology

Proceedings Article | 27 January 2005 Paper
Proc. SPIE. 5645, Advanced Microlithography Technologies
KEYWORDS: Electron beam lithography, X-ray lithography, Photoresist processing, Lithography, Photomasks, Head, X-rays, Silicon, Polymethylmethacrylate, Semiconducting wafers

Proceedings Article | 27 January 2005 Paper
Proc. SPIE. 5645, Advanced Microlithography Technologies
KEYWORDS: Tantalum, X-rays, Semiconducting wafers, X-ray lithography, Photomasks, X-ray imaging, Beam propagation method, X-ray diffraction, Image resolution, Silicon

Proceedings Article | 30 December 2004 Paper
Proc. SPIE. 5641, MEMS/MOEMS Technologies and Applications II
KEYWORDS: Infrared imaging, Microelectromechanical systems, Thermography, Gold, Imaging systems, Silicon, Staring arrays, Scanning electron microscopy, Infrared radiation, Sensors

Proceedings Article | 2 September 2003 Paper
Proc. SPIE. 5253, Fifth International Symposium on Instrumentation and Control Technology
KEYWORDS: Photomasks, X-rays, Silicon, 3D modeling, Convection, Critical dimension metrology, Thermal modeling, Temperature metrology, Finite element methods, Semiconducting wafers

Showing 5 of 6 publications
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