Dr. David J. Abdallah
Senior Research Scientist at AZ Electronic Materials USA Corp
SPIE Involvement:
Author
Publications (12)

Proceedings Article | 11 December 2009 Paper
Proc. SPIE. 7520, Lithography Asia 2009
KEYWORDS: Carbon, Lithography, Etching, Image processing, Silicon, Coating, Fourier transforms, Oxygen, Photoresist materials, Photomasks

Proceedings Article | 1 April 2009 Paper
Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI
KEYWORDS: FT-IR spectroscopy, Image processing, Nitrogen, Fourier transforms, Photoresist materials, Double patterning technology, Head-mounted displays, Photoresist processing, Semiconducting wafers, Electronic design automation

Proceedings Article | 1 April 2009 Paper
Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI
KEYWORDS: Carbon, Lithography, Optical lithography, Etching, Image processing, Silicon, Oxygen, Photoresist materials, Photomasks, Semiconducting wafers

Proceedings Article | 4 December 2008 Paper
Proc. SPIE. 7140, Lithography Asia 2008
KEYWORDS: Lithography, Etching, Polymers, Silicon, Coating, Reflectivity, Fourier transforms, Photoresist materials, Immersion lithography, Semiconducting wafers

Proceedings Article | 15 April 2008 Paper
Proc. SPIE. 6923, Advances in Resist Materials and Processing Technology XXV
KEYWORDS: Carbon, Lithography, Etching, Silicon, Fourier transforms, Oxygen, Photoresist materials, Photomasks, Reactive ion etching, Semiconducting wafers

Showing 5 of 12 publications
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