Dr. David B. Burckel
at Sandia National Labs
SPIE Involvement:
Author
Publications (15)

Proceedings Article | 21 August 2020 Presentation + Paper
Proc. SPIE. 11467, Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XVII
KEYWORDS: Optical components, Plasmonics, Data modeling, Polarization, Near field, Finite element methods, Scatter measurement, Phase shifts, Instrument modeling

Proceedings Article | 4 March 2019 Paper
Proc. SPIE. 10930, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XII
KEYWORDS: Microelectromechanical systems, Metamaterials, Lithography, Electron beam lithography, Etching, Polymers, Silicon, Scanning electron microscopy, Projection lithography, Chemical mechanical planarization

Proceedings Article | 19 September 2018 Paper
Proc. SPIE. 10719, Metamaterials, Metadevices, and Metasystems 2018
KEYWORDS: Finite-difference time-domain method, Data modeling, Polarization, Scattering, Silicon, Magnetism, 3D modeling, Split ring resonators, Optical arrays, Optical metamaterials

Proceedings Article | 17 September 2018 Presentation
Proc. SPIE. 10719, Metamaterials, Metadevices, and Metasystems 2018
KEYWORDS: Plasmonics, 3D acquisition, Dielectrics, Interfaces, Magnetism, Wavefronts, 3D modeling, Antennas, Chemical elements, Light-matter interactions

SPIE Journal Paper | 12 August 2016
JM3 Vol. 15 Issue 03
KEYWORDS: Silicon, Transistors, Integrated circuits, Metals, Capacitance, Spine, Semiconducting wafers, Etching, Lithography, Optical lithography

Showing 5 of 15 publications
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