David R. Hetzer
Process R&D Manager at TEL Technology Ctr America
Area of Expertise:
Lithography , Scatterometry , Patterning , Defectivity
Publications (50)

SPIE Journal Paper | 6 November 2024 Open Access
JM3, Vol. 23, Issue 04, 044004, (November 2024) https://doi.org/10.1117/12.10.1117/1.JMM.23.4.044004
KEYWORDS: Silicon, Superlattices, Germanium, Etching, Film thickness, Nondestructive evaluation, Silicon nitride, Scanning transmission electron microscopy, Scatterometry, Data modeling

Proceedings Article | 28 November 2023 Presentation + Paper
Proceedings Volume PC12750, PC127500G (2023) https://doi.org/10.1117/12.2687901
KEYWORDS: Optical lithography, Extreme ultraviolet lithography, Lithography, Semiconductors, Integrated circuits, Industry, Fiber optic illuminators, Fabrication, Etching

Proceedings Article | 1 May 2023 Poster + Paper
Proceedings Volume 12498, 1249821 (2023) https://doi.org/10.1117/12.2657290
KEYWORDS: Extreme ultraviolet, Extreme ultraviolet lithography, Light sources and illumination, Etching, Coating thickness, Optical lithography, Printing, Lithography

Proceedings Article | 1 May 2023 Poster + Paper
Proceedings Volume 12498, 1249822 (2023) https://doi.org/10.1117/12.2658880
KEYWORDS: Extreme ultraviolet, Metal oxides, Line edge roughness, Extreme ultraviolet lithography, Optical lithography, Inspection, Interfaces, Etching, Plasma etching, Photoresist processing

Proceedings Article | 30 April 2023 Presentation
Eric Liu, Akiteru Ko, Sophie Thibaut, Katie Lutker-Lee, Steven Grzeskowiak, Alexandra Krawicz, Christopher Cole, Hamed Hajibabaei, Sergey Voronin, Nayoung Bae, Angelique Raley, Lior Huli, Kanzo Kato, David Hetzer, Kathleen Nafus, Seiji Fujimoto, Seiji Nagahara, Satoru Shimura, Shinichiro Kawakami, Congque Dinh, Yuhei Kuwahara, Shigeru Tahara, Masanobu Honda, Tetsuya Nishizuka, Peter Biolsi, Hiromasa Mochiki
Proceedings Volume PC12499, PC124990H (2023) https://doi.org/10.1117/12.2659720
KEYWORDS: Etching, Optical lithography, Lithography, Extreme ultraviolet, Plasma etching, Plasma, Transistors, Semiconducting wafers, Photoresist processing, Photochemistry

Showing 5 of 50 publications
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