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David Pham
Application Engineering Mgr at Onto Innovation Inc
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Publications (2)
SPIE Journal Paper | 1 January 2003
Implementing a fully automatic macro defect detection and classification system in a high-production semiconductor fab
Juanita Miller, Lloyd Lee, Michael Pham, David Pham, Manyam Khaja, Kathleen Hennessey
JM3, Vol. 2, Issue 01, (January 2003) https://doi.org/10.1117/12.10.1117/1.1528947
KEYWORDS: Semiconducting wafers, Defect detection, Inspection, Classification systems, Wafer inspection, Manufacturing, System integration, Semiconductors, Optical lithography, Yield improvement
Proceedings Article | 16 July 2002 Paper
Implementing fully automatic macro defect detection and classification system in high-production semiconductor fab
Lloyd Lee, Michael Pham, David Pham, Manyam Khaja, Kathleen Hennessey, Juanita Miller
Proceedings Volume 4689, (2002) https://doi.org/10.1117/12.473524
KEYWORDS: Semiconducting wafers, Inspection, Defect detection, Classification systems, Wafer inspection, System integration, Manufacturing, Semiconductors, Optical lithography, Metrology
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