This papers reports on the integration of pixelated multispectral filters on a COTS CMOS detector CMV4000 from CMOSIS. This paper covers several aspects: from de filter conception, to its characterization before and after its integration on the detector. Studies on demosaicing and inter-pixel crosstalk correction will also be presented. The last domain covered by this paper is a space assessment carried out on some assembly in order to check any weakness concerning space environment particularities.
This paper presents the technical solutions implemented with the support of the French Space Agency (CNES) to design and manufacture hermetic Lithium Niobate (LiNbO3: LN) modulators, in the framework of a Research & Technology (R&T) project [1]. There is also presented some identified space-compatible raw materials that constitute modulators and some relevant results of a space evaluation program realized on about fifteen of these hermetic modulators (including hermeticity tests, mechanical tests and climatic tests).
Until now, the determination of the hermeticity of microelectronic packages is related to the MIL-STD-883 method 1014
which is based on the He leak detection method. But this method is no more suited for small packages due to the
resolution limit of the apparatus used conventionally. Indeed the minimum detectable leak rate is of the order of 5.10-11
atm.cm3.s-1. Leaks induced by non hermetic MEMS packages are often one order of magnitude smaller. So, the
sensitivity of the He leak detector method is too low and this method can not be applied anymore. The MEMS packages
produced with wafer level encapsulation techniques, require new methodologies to measure hermeticity appropriately
and accurately. The purpose of this paper is to present the development of alternative methods for testing the hermeticity
of MEMS micro-cavities. Two methods will be investigated in the context of this study: The membrane deflection
measurement exposed to different pressures, using optical profilometry, and the measurement of the variation of gas
concentration in a sealed silicon cavity by Fourier-transform infrared spectroscopy (FT-IR). The calculated leak rates are
compared for samples where standard fine leak test gave no results. The values obtained for the leak rates within optical
test and FT-IR test for the same sample are identical, showing the relevance of these two methods.
This paper presents hermeticity tests carried out on organically sealed MEMS micro-packages, using Fourier Transform Infra Red (FTIR) spectroscopy. Infrared spectroscopy, classically dedicated to material analysis, can be used to monitor the internal pressure of micro-packages, and to assess so their hermeticity. This technique was applied to BCB sealed micro-packages to study the influence of different parameters on their hermeticity properties, like the sealing ring dimensions or the addition of an external coating. The technique was validated for silicon micro-packages with a volume of 5 mm3 or more. Moreover, measurements carried out on micro-cavities with external parylene coatings have demonstrated that infrared spectroscopy measurements could be performed on MEMS packages with hermetic organic coatings.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.