Delia Ristoiu
Senior Etch Engineer at STMicroelectronics SA
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 23 March 2020 Presentation + Paper
Proc. SPIE. 11326, Advances in Patterning Materials and Processes XXXVII
KEYWORDS: Lithography, CMOS sensors, Etching, Polymers, Image sensors, Microlens, Plasma etching, Plasma

Proceedings Article | 22 May 2018 Paper
Proc. SPIE. 10686, Silicon Photonics: From Fundamental Research to Manufacturing
KEYWORDS: Photonic devices, Coarse wavelength division multiplexing, Waveguides, Polarization, Silicon, Wavelength division multiplexing, Wave propagation, Silicon photonics, Data communications, Semiconducting wafers

Proceedings Article | 16 July 2002 Paper
Proc. SPIE. 4689, Metrology, Inspection, and Process Control for Microlithography XVI
KEYWORDS: Metrology, Detection and tracking algorithms, Metals, Image processing, Pattern recognition, Copper, Precision measurement, Optical alignment, Semiconducting wafers, Overlay metrology

Proceedings Article | 16 July 2002 Paper
Proc. SPIE. 4689, Metrology, Inspection, and Process Control for Microlithography XVI
KEYWORDS: Semiconductors, Metrology, Metals, Time metrology, Process control, Optical alignment, Niobium, Semiconducting wafers, Prototyping, Overlay metrology

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