Dr. Derek Bassett Profile

Dr. Derek Bassett

at Tokyo Electron America Inc

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Publications (2)

Proceedings Article | 19 March 2012 Paper

Line-pattern collapse mitigation status for EUV at 32nm HP and below

Michael Carcasi, Derek Bassett, Wallace Printz, Shinichiro Kawakami, Yuichiro Miyata

Proceedings Volume 8325, 83250K (2012) https://doi.org/10.1117/12.916310

KEYWORDS: Extreme ultraviolet, Extreme ultraviolet lithography, Finite element methods, Capillaries, Polymers, Line width roughness, Neodymium, Polymer thin films, Protactinium, Semiconducting wafers

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Proceedings Article | 21 March 2006 Paper

Drag-a-drop: a characterization tool for immersion lithography

Derek Bassett, J. Chris Taylor, Will Conley, C. Grant Willson, Roger Bonnecaze

Proceedings Volume 6154, 61544P (2006) https://doi.org/10.1117/12.656482

KEYWORDS: Semiconducting wafers, Microfluidics, Photomasks, Polymers, Glasses, Immersion lithography, Photoresist materials, Dewetting, Reflection, Scanners

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