Mr. Derek C. Fung Profile

Derek C. Fung

Applications Development Engineer at KLA Corp

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Publications (1)

Proceedings Article | 3 October 2018 Paper

EUV stochastic defect monitoring with advanced broadband optical wafer inspection and e-beam review systems

Kaushik Sah, Andrew Cross, Martin Plihal, Vidyasagar Anantha, Raghav Babulnath, Derek Fung, Peter De Bisschop, Sandip Halder

Proceedings Volume 10809, 1080909 (2018) https://doi.org/10.1117/12.2501825

KEYWORDS: Stochastic processes, Inspection, Scanning electron microscopy, Optical inspection, Photomasks, Etching, Extreme ultraviolet, Semiconducting wafers, Printing, Critical dimension metrology

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