Mr. Devendra Joshi Profile

Devendra Joshi

Director/Engineering at Cadence Design Systems Inc

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Publications (3)

Proceedings Article | 27 December 2002 Paper

Integrating CD and lithographic process window analysis with mask data preparation for subwavelength ICs

Devendra Joshi, Danny Keogan, James Falbo

Proceedings Volume 4889, (2002) https://doi.org/10.1117/12.467847

KEYWORDS: Photomasks, Lithography, Semiconducting wafers, Process modeling, Optical proximity correction, Manufacturing, Computed tomography, Inspection, Silicon, Optics manufacturing

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Proceedings Article | 30 July 2002 Paper

Subwavelength lithography: an impact of photo mask errors on circuit performance

Linard Karklin, Stan Mazor, Devendra Joshi, Artur Balasinski, Valery Axelrad

Proceedings Volume 4691, (2002) https://doi.org/10.1117/12.474575

KEYWORDS: Photomasks, Lithography, Error analysis, Manufacturing, Monte Carlo methods, Field effect transistors, Optical lithography, Semiconducting wafers, Resolution enhancement technologies, Lithographic illumination

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Proceedings Article | 14 September 2001 Paper

Advanced procedure to evaluate process performance at very low k1 based on device parameters linked to lithography and process data:II. Verification of cell layout based on integration of optical an

Artur Balasinski, Walter Iandolo, Devendra Joshi, Linard Karklin, Valery Axelrad

Proceedings Volume 4346, (2001) https://doi.org/10.1117/12.435693

KEYWORDS: Metals, Field effect transistors, Critical dimension metrology, Transistors, Integrated optics, Optical proximity correction, Silicon, Cadmium, Optical simulations, Resistance

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