Dr. Dhirendra P. Mathur Profile

Dr. Dhirendra P. Mathur

Director, Tech. Applications

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 28 May 2003 Paper

Through the looking glass: what is on the horizon for the mask maker?

R. Scott Mackay, Benjamin Eynon, Dhirendra Mathur

Proceedings Volume 5148, (2003) https://doi.org/10.1117/12.514946

KEYWORDS: Photomasks, Manufacturing, Lithography, Extreme ultraviolet lithography, Glasses, Mask making, Pellicles, Inspection, Optical lithography, Semiconducting wafers

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Proceedings Article | 1 August 2002 Paper

Application of vector scan electron-beam lithography to 45-nm node extreme-ultraviolet lithography reticles

David Walker, Dhirendra Mathur, Clyde Su, Torey Huang

Proceedings Volume 4754, (2002) https://doi.org/10.1117/12.476990

KEYWORDS: Reticles, Extreme ultraviolet lithography, Photomasks, Manufacturing, Lithography, Standards development, Electron beam lithography, Photoresist processing, Inspection, Extreme ultraviolet

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Conference Committee Involvement (3)

Photomask Technology

3 October 2005 | Monterey, California, United States

Photomask Technology

14 September 2004 | Monterey, California, United States

Photomask Technology

1 October 2002 | Monterey, CA, United States

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