Dr. Dion J. Klunder
at Philips Research Nederland BV
SPIE Involvement:
Author
Publications (7)

Proceedings Article | 9 May 2008 Paper
Dion J. Klunder, Maarten M. J. van Herpen, Aleksey Kolesnychenko, Eefje Hornix, Nicoletta Kahya, Ruth de Boer, Henk Stapert
Proceedings Volume 6991, 69910P (2008) https://doi.org/10.1117/12.781340
KEYWORDS: Biosensors, Molecules, Luminescence, Polarization, Signal detection, Glasses, Aluminum, Signal attenuation, Optical filters, Diagnostics

Proceedings Article | 24 March 2006 Paper
Wouter Soer, Dion Klunder, Maarten van Herpen, Leon Bakker, Vadim Banine
Proceedings Volume 6151, 61514B (2006) https://doi.org/10.1117/12.682357
KEYWORDS: Particles, Extreme ultraviolet, Contamination, Argon, Extreme ultraviolet lithography, Tin, Lithography, EUV optics, Chemical species, Resistance

Proceedings Article | 24 March 2006 Paper
E. Louis, R. W .E. van de Kruijs, A. E. Yakshin, S. Alonso van der Westen, F. Bijkerk, M. M. J. W. van Herpen, D. J. W. Klunder, L. Bakker, H. Enkisch, S. Müllender, M. Richter, V. Banine
Proceedings Volume 6151, 615139 (2006) https://doi.org/10.1117/12.675132
KEYWORDS: Multilayers, Reflectivity, Extreme ultraviolet, EUV optics, Optical components, Extreme ultraviolet lithography, Mirrors, Silicon, Optical coatings, Vacuum ultraviolet

Proceedings Article | 6 May 2005 Paper
D. Klunder, M. van Herpen, V. Banine, K. Gielissen
Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.619568
KEYWORDS: Tin, Hydrogen, Extreme ultraviolet lithography, Extreme ultraviolet, EUV optics, Chemical species, Argon, Particles, Ultraviolet radiation, Ions

Proceedings Article | 8 March 2004 Paper
Dion Klunder, Job Elders, Gert-Jan Burger, Martin Amersfoort, Evgueni Krioukov, Cees Otto, Hugo Hoekstra, Alfred Driessen
Proceedings Volume 5269, (2004) https://doi.org/10.1117/12.515862
KEYWORDS: Microresonators, Integrated optics, Homeland security, Sensors, Absorption, Luminescence, Refractive index, Biological research, Biosensing, Silicon

Showing 5 of 7 publications
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