Dr. Dionysios Petromanolakis Profile

Dr. Dionysios Petromanolakis

at Univ of Piraeus

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Publications (1)

Proceedings Article | 22 January 2018 Presentation + Paper

Reduction and control of intrafield focus variation on 7nm technology

Jennifer Shumway, Nathan Neal, Sheldon Meyers, Jens Reichelt, Young Ki Kim, Justin Hanson, Ferhad Kamalizadeh, Dionysios Petromanolakis, Youri van Dommelen, Robert Bonanni, Arjan Gijsbertsen

Proceedings Volume 10147, 101470B (2018) https://doi.org/10.1117/12.2258391

KEYWORDS: Optical lithography, Current controlled current source, Calibration, Scanners, Reticles, Monochromatic aberrations, Software development, Semiconducting wafers

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