Mr. Dirk Hauschild Profile

Dirk Hauschild

Senior Strategic Marketing Expert at Focuslight Technologies Inc.

SPIE Involvement:

Author

Area of Expertise:

Photonics , Marketing , Laser Materials Processing , Optics Design , Micro-optics , Nano-optics

Websites:

Company Website

Profile Summary

>30 years experience in enabling and marketing technologies with a demonstrated history of working in the nanotechnology industry. Skilled in Photoncis, Thin Films, Materials Science, CMOS, Nanotechnology, and Semiconductor Industry. Strong engineering professional with a Diplom-Ingenieur in electrical engineering with focus on RF technology from Technische Universität Carolo-Wilhelmina zu Braunschweig.

Publications (15)

Proceedings Article | 1 April 2022 Presentation

Presentation

Scaling productivity and performance of laser materials processing with beam combining micro-optics

Dirk Hauschild

Proceedings Volume PC11982, PC1198204 (2022) https://doi.org/10.1117/12.2610049

KEYWORDS: Laser processing, Micro optics, Laser sources, Laser applications, Pulsed laser operation, Beam shaping, Raw materials, Optical design, Optical components, Materials processing

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Proceedings Article | 1 April 2022 Presentation

Presentation

Multi-surface wafer-level optics for adaption of diode laser waveguide modes into application modes

Dirk Hauschild

Proceedings Volume PC11982, PC1198206 (2022) https://doi.org/10.1117/12.2609959

KEYWORDS: Waveguide modes, Semiconductor lasers, Wafer-level optics, Optical components, Semiconducting wafers, Optical design, Beam shaping, Waveguides, Photonic integrated circuits, Optical isolators

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Proceedings Article | 11 March 2020 Presentation

Presentation

Glass diffuser with constant power density in 360° LIDAR illumination (Conference Presentation)

Dirk Hauschild, Yong Liang, Alexei Krasnaberski

Proceedings Volume 11261, 1126108 (2020) https://doi.org/10.1117/12.2545789

KEYWORDS: LIDAR, Glasses, Diffusers, Laser sources, Optical design, Diffractive optical elements, Surface finishing, Mirrors, Light, Optical components

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Proceedings Article | 11 March 2020 Presentation

Presentation

Compact and energy efficient IR laser architecture (Conference Presentation)

Dirk Hauschild, Stephan Schneider, Andre Gruetz

Proceedings Volume 11261, 112610X (2020) https://doi.org/10.1117/12.2545753

KEYWORDS: Infrared lasers, Semiconductor lasers, Heat treatments, Micro optics, Laser sources, Beam shaping, Product engineering, Diodes, High power lasers, Head

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Proceedings Article | 4 March 2019 Presentation

Presentation

Glass optics on polymer cost level by scalable mass production process based on wafer processing (Conference Presentation)

Dirk Hauschild, Dirk Bogs

Proceedings Volume 10899, 108990L (2019) https://doi.org/10.1117/12.2509618

KEYWORDS: Wafer-level optics, Semiconducting wafers, Glasses, Polymers, Polishing, Semiconductor lasers, Laser optics, Cylindrical lenses, Microelectronics, Lenses

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Proceedings Article | 20 February 2018 Presentation + Paper

Presentation + Paper

Fully utilizing high power diode lasers by synergizing diode laser light sources and beam shaping micro-optics

Yingmin Fan, Jingwei Wang, Lei Cai, Thomas Mitra, Dirk Hauschild, Chung-En Zah, Xingsheng Liu

Proceedings Volume 10513, 105130H (2018) https://doi.org/10.1117/12.2293612

KEYWORDS: Semiconductor lasers, Beam shaping, Micro optics, Light sources, Laser applications, Collimation, Cladding, High power diode lasers, Laser processing, Annealing

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Proceedings Article | 22 February 2017 Presentation + Paper

Presentation + Paper

Application specific beam profiles: new surface and thin-film refinement processes using beam shaping technologies

Dirk Hauschild

Proceedings Volume 10085, 100850J (2017) https://doi.org/10.1117/12.2252388

KEYWORDS: Beam shaping, Laser applications, Laser processing, Materials processing, Photons, Thin films, Process control, Packaging, Micro optics, Resonators, Laser sources, Pulsed laser operation, Diffusion, Continuous wave operation

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Proceedings Article | 1 July 2015 Paper

Paper

Laser cutting metallic plates using a 2kW direct diode laser source

E. Fallahi Sichani, D. Hauschild, J. Meinschien, J. Powell, E. Assunção, J. Blackburn, A. Khan, C. Kong

Proceedings Volume 9657, 96570C (2015) https://doi.org/10.1117/12.2179475

KEYWORDS: Laser cutting, Aluminum, Semiconductor lasers, Oxygen, Copper, Nickel, Nitrogen, Surface roughness, Metals, Laser sources

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Proceedings Article | 25 February 2009 Paper

Paper

Optimizing laser beam profiles using micro-lens arrays for efficient material processing: applications to solar cells

Dirk Hauschild, Oliver Homburg, Thomas Mitra, Mikhail Ivanenko, Manfred Jarczynski, Jens Meinschien, Andreas Bayer, Vitalij Lissotschenko

Proceedings Volume 7202, 72020U (2009) https://doi.org/10.1117/12.809270

KEYWORDS: Beam shaping, Laser sources, Gaussian beams, Laser processing, Silicon, Solar cells, Annealing, Micromachining, Materials processing, Semiconductor lasers

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Proceedings Article | 7 March 2008 Paper

Paper

Novel refractive optics enable multipole off-axis illumination

T. Bizjak, T. Mitra, D. Hauschild, L. Aschke

Proceedings Volume 6924, 69242J (2008) https://doi.org/10.1117/12.771213

KEYWORDS: Micro optics, Lens design, Chemical elements, Deep ultraviolet, Optical components, Beam shaping, Manufacturing, Optics manufacturing, Semiconducting wafers, Lithographic illumination

Read Abstract +

Optical lithography in the deep ultraviolet (DUV) region is being pushed to reach the limits of printing resolution. The effort required to achieve the 32 nm structure with this technology puts very hard conditions and requests on the illumination optics. Different kinds of illumination modes are combined to get into a regime of extreme numerical aperture (hyper NA). Arrays of refractive micro-optics have been and continue to be the ideal solution for high transmission homogenizing elements for several tool generations. Illumination of the masks with high numerical aperture is critical for achieving the smallest structure on the semiconductor material. Exposure tools use different illumination modes to get better imaging of certain mask structures. The beam shaping necessary to create these illumination modes is achieved mostly with diffractive elements. Most of the currently used modes can also be created with arrays of refractive micro-optics, manufactured from fused silica and calcium fluoride. The advantage over the diffractive optical elements lies in efficiency, which comes close to 90%. An important prerequisite for these special types of optical elements is LIMO's unique production technology which can manufacture free form surfaces on monolithic arrays exceeding 200 mm edge length with high precision and reproducibility. These homogenizing elements in the illumination optics can provide a custom designed intensity distribution, and offer the possibility to correct the failure of other optical elements. Each lens can be designed individually and can also be shaped asymmetrically. Thus unusual lens sizes and shapes can be produced, and various far fields such as rectangles, lines, hexagons or multi-poles can be achieved. In this paper we present novel refractive micro-optical elements which create rectangular dipole illumination. They can also be combined in such a way as to create a quadrupole with variable intensity ratio between the vertical and horizontal poles. The huge advantage of such a multipole illumination is polarization control and variable intensity in poles. Working on this combination, the resolution can be enhanced even further.

Proceedings Article | 12 September 2007 Paper

Paper

Refractive beam shaping: from Maxwell's Equations to products and applications in laser materials processing

O. Homburg, D. Hauschild, P. Harten, L. Aschke, V. Lissotschenko

Proceedings Volume 6663, 66630D (2007) https://doi.org/10.1117/12.737783

KEYWORDS: Beam shaping, Micromachining, Laser sources, Gaussian beams, Annealing, Laser processing, Silicon, Phase shifting, Laser ablation, Optics manufacturing

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Proceedings Article | 12 September 2007 Paper

Paper

Beam shaping on the base of micro lenslet arrays with the help of diffraction and interference effects

Yu. Miklyaev, D. Hauschild, A. Mikhailov, V. Lissotschenko

Proceedings Volume 6663, 666308 (2007) https://doi.org/10.1117/12.738017

KEYWORDS: Beam shaping, Diffraction, Electro optics, Raster graphics, Lenses, Software development, Control systems, Optical design, Beam steering, Solid state lasers

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Proceedings Article | 21 June 2006 Paper

Paper

How refractive microoptics enable lossless hyper-NA illumination systems for immersion lithography

H. Ganser, M. Darscht, Y. Miklyaev, D. Hauschild, L. Aschke

Proceedings Volume 6281, 62810P (2006) https://doi.org/10.1117/12.692704

KEYWORDS: Semiconducting wafers, Micro optics, Photomasks, Microlens, Cylindrical lenses, Beam shaping, Lithographic illumination, Chemical elements, Polarization, Immersion lithography

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Proceedings Article | 12 May 2006 Paper

Paper

Efficient beam shaping for high-power laser applications

O. Homburg, D. Hauschild, F. Kubacki, V. Lissotschenko

Proceedings Volume 6216, 621608 (2006) https://doi.org/10.1117/12.668004

KEYWORDS: Beam shaping, Semiconductor lasers, High power lasers, Microlens array, Collimation, Laser systems engineering, Solids, Gaussian beams, Phase shifting, Materials processing

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Proceedings Article | 15 March 2006 Paper

Paper

High-throughput homogenizers for hyper-NA illumination systems

H. Ganser, M. Darscht, Y. Miklyaev, D. Hauschild, L. Aschke

Proceedings Volume 6154, 61542N (2006) https://doi.org/10.1117/12.656402

KEYWORDS: Semiconducting wafers, Photomasks, Microlens, Cylindrical lenses, Micro optics, Polarization, Beam shaping, Chemical elements, Microlens array, Sodium

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Showing 5 of 15 publications

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