Dr. Dirk Pfeiffer
Research Staff Member at IBM Thomas J Watson Research Ctr
SPIE Involvement:
Author
Publications (8)

Proceedings Article | 26 March 2008 Paper
Proc. SPIE. 6923, Advances in Resist Materials and Processing Technology XXV
KEYWORDS: Lithography, Multilayers, Optical lithography, Etching, Polymers, Interfaces, Silicon, Reflectivity, Photoresist materials, Semiconducting wafers

Proceedings Article | 27 March 2007 Paper
Proc. SPIE. 6520, Optical Microlithography XX
KEYWORDS: Lithography, Diffraction, Reflectivity, Wavefronts, Photomasks, Source mask optimization, Optical proximity correction, Optimization (mathematics), Tolerancing, Binary data

Proceedings Article | 29 March 2006 Paper
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: Oxides, Lithography, Optical lithography, Etching, Polymers, Silicon, Reflectivity, Photoresist materials, Silicon films, Reactive ion etching

Proceedings Article | 4 May 2005 Paper
Proc. SPIE. 5753, Advances in Resist Technology and Processing XXII
KEYWORDS: Lithography, Monochromatic aberrations, FT-IR spectroscopy, Etching, Quartz, Polymers, Spectroscopy, Crystals, Silicon, Resistance

Proceedings Article | 4 May 2005 Paper
Proc. SPIE. 5753, Advances in Resist Technology and Processing XXII
KEYWORDS: Lithography, Polymers, Glasses, Spectroscopy, Silicon, Diffusion, Macromolecules, Line edge roughness, Standards development, Chemically amplified resists

Showing 5 of 8 publications
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