Dr. Dmitry Shefer Profile

Dr. Dmitry Shefer

at Eindhoven Univ of Technology

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Publications (2)

Proceedings Article | 10 April 2024 Presentation + Paper

Particle mobilization by EUV-induced plasma and fast electrons

Mark van de Kerkhof, Dmitry Shefer, Andrey Nikipelov, Fabio Sbrizzai, Vladimir Kvon, Sim Bouwmans, Job Beckers, Vadim Banine

Proceedings Volume 12953, 129530E (2024) https://doi.org/10.1117/12.3009896

KEYWORDS: Particles, Plasma, Electrons, Adhesion, Scanners, Hydrogen, Extreme ultraviolet lithography, Ions, Stochastic processes, Particle contamination

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Proceedings Article | 22 February 2021 Poster + Presentation + Paper

Morphology change and release of tin and lead micro-particles from substrates in hydrogen plasma

Dmitry Shefer, Andrey Nikipelov, Mark van de Kerkhof, Vadim Banine, Job Beckers

Proceedings Volume 11609, 116091F (2021) https://doi.org/10.1117/12.2581666

KEYWORDS: Plasma, Particles, Hydrogen, Tin, Lead, Extreme ultraviolet lithography, Ions, Semiconducting wafers, Reticles, Extreme ultraviolet

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