Prof. Do Yeung Yoon Profile

Prof. Do Yeung Yoon

at Seoul National Univ

SPIE Involvement:

Author

Publications (4)

Proceedings Article | 28 March 2008 Paper

Porosity characteristics of ultra-low dielectric insulator films directly patterned by nano-imprint lithography

Hyun Wook Ro, Ronald Jones, Huagen Peng, Hae-Jeong Lee, Eric Lin, Alamgir Karim, Do Yoon, David Gidley, Christopher Soles

Proc. SPIE. 6921, Emerging Lithographic Technologies XII

KEYWORDS: Electron beam lithography, Optical lithography, Scattering, Skin, X-rays, Dielectrics, Silicon, Reflectivity, Picosecond phenomena, Nanoimprint lithography

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Proceedings Article | 15 March 2007 Paper

Nanoimprint lithography for the direct patterning of nanoporous interlayer dielectric insulator materials

Hyun Wook Ro, Hae-Jeong Lee, Eric Lin, Alamgir Karim, Daniel Hines, Do Yoon

Proc. SPIE. 6517, Emerging Lithographic Technologies XI

KEYWORDS: Semiconductors, Thin films, Lithography, Electron beam lithography, Optical lithography, X-rays, Dielectrics, Silicon, Reflectivity, Nanoimprint lithography

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Proceedings Article | 15 September 1993 Paper

Molecular design for stabilization of chemical amplification resist toward airborne contamination

Hiroshi Ito, William England, Nicholas Clecak, Gregory Breyta, Hoosung Lee, Do Yoon, Ratnam Sooriyakumaran, William Hinsberg

Proc. SPIE. 1925, Advances in Resist Technology and Processing X

KEYWORDS: Lithography, Refractive index, Contamination, Polymers, Glasses, Ultraviolet radiation, Annealing, Silicon, Polymer thin films, Absorption

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Proceedings Article | 1 December 1990 Paper

Organic nonlinear optical materials and their device applications for frequency doubling, modulation, and switching

Jerome Swalen, Gary Bjorklund, Stephen Ducharme, William Fleming, Stephan Herminghaus, Dietmar Jungbauer, William Moerner, Barton Smith, Robert Twieg, Do Yoon, C. Grant Willson

Proc. SPIE. 1337, Nonlinear Optical Properties of Organic Materials III

KEYWORDS: Second-harmonic generation, Switching, Modulation, Polymers, Crystals, Chromophores, Organic materials, Nonlinear optics, Nonlinear crystals, Nonlinear optical materials

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