Dr. Donald W. Johnson
President/CEO at Kayaku Advanced Materials Inc
SPIE Involvement:
Publications (12)

Proceedings Article | 22 March 2007 Paper
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Lithography, Etching, Polymers, Ultraviolet radiation, Coating, Resistance, Epoxies, Nanoimprint lithography, Semiconducting wafers, Temperature metrology

Proceedings Article | 21 April 2006 Paper
Proc. SPIE. 6185, Micro-Optics, VCSELs, and Photonic Interconnects II: Fabrication, Packaging, and Integration
KEYWORDS: Lithography, Microscopes, Microlens array, Polymers, Capillaries, Ultraviolet radiation, Microlens, Photomasks, Spherical lenses, Standards development

Proceedings Article | 24 July 2002 Paper
Proc. SPIE. 4690, Advances in Resist Technology and Processing XIX
KEYWORDS: Polymers, Coating, Photoresist materials, Polymerization

Proceedings Article | 11 June 1999 Paper
Proc. SPIE. 3678, Advances in Resist Technology and Processing XVI
KEYWORDS: Thin films, Lithography, Etching, Polymers, Image processing, Scanning electron microscopy, Photoresist materials, Line edge roughness, Reactive ion etching, Photomicroscopy

Proceedings Article | 29 June 1998 Paper
Proc. SPIE. 3333, Advances in Resist Technology and Processing XV
KEYWORDS: Lithography, Deep ultraviolet, Polymers, Image processing, Diffusion, Photoresist materials, Integrated circuits, Photoresist developing, Absorption, Chemically amplified resists

Showing 5 of 12 publications
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