Dr. Dong Qing Zhang
at GLOBALFOUNDRIES Singapore Pte. Ltd.
SPIE Involvement:
Author
Publications (11)

Proceedings Article | 22 March 2018 Paper
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Metrology, Data modeling, Calibration, Image processing, Error analysis, Scanning electron microscopy, Time metrology, Optical proximity correction, Critical dimension metrology, Semiconducting wafers

Proceedings Article | 16 October 2017 Paper
Proc. SPIE. 10451, Photomask Technology 2017
KEYWORDS: Edge detection, Detection and tracking algorithms, Silicon, Feature extraction, Printing, Gaussian filters, Image filtering, Image classification, SRAF, Semiconducting wafers

Proceedings Article | 18 March 2015 Paper
Proc. SPIE. 9426, Optical Microlithography XXVIII
KEYWORDS: Calibration, Image processing, Scanning electron microscopy, Printing, Optical proximity correction, SRAF, Optimization (mathematics), Semiconducting wafers, Binary data, Lawrencium

Proceedings Article | 18 March 2015 Paper
Proc. SPIE. 9426, Optical Microlithography XXVIII
KEYWORDS: Wafer-level optics, Data modeling, Calibration, 3D modeling, Photomasks, Optical proximity correction, SRAF, Photoresist processing, Semiconducting wafers, Performance modeling

Proceedings Article | 31 March 2014 Paper
Proc. SPIE. 9052, Optical Microlithography XXVII
KEYWORDS: Data modeling, Scanners, 3D modeling, Photomasks, Optical proximity correction, 3D scanning, Semiconducting wafers, Optics manufacturing, Performance modeling, Binary data

Showing 5 of 11 publications
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