Mr. Donghwan Song Profile

Donghwan Song

at KLA Corp

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 26 September 2019 Presentation + Paper

Demonstrating the value of integrated reticle automation solutions in high volume wafer fab manufacturing

Frank CM Wu, Chin Kuei Chang, Yousheng Yin, Jeffery Liang, Chain Ping Chen, Wei Chen, Donghwan Song, Jinghua Zeng, Kunal Rohilla, Alexander Tan, Yanghui Liu

Proceedings Volume 11148, 111481O (2019) https://doi.org/10.1117/12.2536788

KEYWORDS: Reticles, Photomasks, Semiconducting wafers, Manufacturing, Inspection, Resolution enhancement technologies, Optical proximity correction, SRAF

Read Abstract +

In an advanced IC fab, reticle inspection issues are critical as even one killer defect on the reticle can potentially affect thousands of wafers. Human errors such as defect mis-classification may lead to 70% of reticle issues that may affect production efficiency or even impact yield. With the adoption of RET techniques like aggressive OPC and SRAF combined with increasing MEEF and smaller defects, reticle dispositioning is becoming even harder and very time consuming in production. Even an experienced engineer may make a mistake especially when dealing with 40nm and below design nodes. The concept of automation to prevent mistakes in operation has been promoted for many years but a comprehensive solution which covers intelligent task assignment and auto reticle dispositioning in volume production has been missing. Working together with KLA, USCXM proposed a detailed methodology to overcome the above difficulties. From the very beginning, USCXM used Systematic Auto Recipe Creation (SARC) to create recipes for reticle inspections even before the reticles arrived in the fab. Also, an “OHT taxi mode” to improve pod utilization combined with the Reticle Management System (RMS) decision tree algorithm intelligently determined reticle inspection frequency based on wafer requirement and tool redundancy. Finally, USCXM automated final reticle dispositioning steps, such as, auto-releasing or auto-holding the reticle based on KLA’s Reticle Analyzer (RA) results. The overall implementation resulted in 25% improvement in inspection capacity and 50% reduction in operational cost compared to the traditional flow. Further, 92% accuracy for reticle auto-dispositioning was achieved with zero under-estimation. This integrated flow has proven to be invaluable for USCXM and is now deployed in full volume reticle manufacturing production.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years