Electro-statically actuated sub-micro beam resonators, which can be used as sensors in biology or filters in wireless
communications, have gotten significant attention due to their simple geometries, excellent electrical and mechanical
characteristics and extensively potential applications. In this paper, we present comprehensive analysis of the
nonlinearity in frequency response of sub-micro cantilevers, clamped-clamped and beam resonators which are actuated
by electro-static force. The spring hardening effects and softening effects are observed in the experiment. It is found that
the nonlinearity is relatively independent of the AC voltage, but is markedly enhanced by increasing of DC voltage.
However, the response nonlinearity of the doubly clamped beam shows different feature from that of the cantilever. The
reason is also explored in this paper. A nonlinear model is introduced to explain the nonlinearity of the frequency
response. This investigation provides us an understanding of the nonlinear dynamic characteristics of sub-micro beam
resonators. It is helpful for us to study the sensitivity when the beam is used in a detecting system or used to be a sensor.
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