Dragan Petrovic
at Technische Univ Wien
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 10 September 2002 Paper
Proc. SPIE. 4928, MEMS/MOEMS Technologies and Applications
KEYWORDS: Microelectromechanical systems, Gold, Polishing, Calibration, Ultraviolet radiation, Nickel, Scanning electron microscopy, Photoresist materials, Semiconducting wafers, Prototyping

Proceedings Article | 21 November 2001 Paper
Proc. SPIE. 4592, Device and Process Technologies for MEMS and Microelectronics II
KEYWORDS: Electrodes, Image processing, Dielectrics, Surface roughness, Scanning electron microscopy, Image quality, Bridges, Tolerancing, Surface finishing, Microtechnology

Proceedings Article | 28 September 2001 Paper
Proc. SPIE. 4557, Micromachining and Microfabrication Process Technology VII
KEYWORDS: Microelectromechanical systems, Actuators, Microscopes, Optical sensors, Microsystems, Sensors, Reliability, Sensing systems, Chemical elements, Mechanical sensors

Proceedings Article | 5 April 2001 Paper
Proc. SPIE. 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001
KEYWORDS: Microelectromechanical systems, Microsystems, Sensors, Silicon, Control systems, Microfabrication, Optical pattern recognition, Assembly equipment, Prototyping, Standards development

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