Dr. Eberhard Adolf Spiller
Retired at Spiller X-Ray Optics
SPIE Involvement:
Publications (61)

Proceedings Article | 5 June 2018 Paper
Proc. SPIE. 10691, Advances in Optical Thin Films VI
KEYWORDS: Multilayers, Data modeling, X-rays, Interfaces, Silicon, Reflectivity, Silicon carbide, Molybdenum, Systems modeling

Proceedings Article | 17 April 2014 Paper
Proc. SPIE. 9048, Extreme Ultraviolet (EUV) Lithography V
KEYWORDS: Lithography, Mirrors, Metrology, Optical coatings, Wavefronts, Optical fabrication, Projection systems, Aspheric lenses, Extreme ultraviolet, Extreme ultraviolet lithography

SPIE Journal Paper | 6 September 2013
OE Vol. 52 Issue 09
KEYWORDS: Mirrors, Extreme ultraviolet, Reflectivity, Multilayers, Imaging systems, Ultraviolet radiation, Optical coatings, EUV optics, Spatial frequencies, Optical engineering

Proceedings Article | 1 April 2013 Paper
Proc. SPIE. 8679, Extreme Ultraviolet (EUV) Lithography IV
KEYWORDS: Lithography, Mirrors, Multilayers, Metrology, Wavefronts, Optical testing, Projection systems, Aspheric lenses, Extreme ultraviolet, Extreme ultraviolet lithography

Proceedings Article | 15 October 2012 Paper
Proc. SPIE. 8501, Advances in Metrology for X-Ray and EUV Optics IV
KEYWORDS: Telescopes, Mirrors, Multilayers, Spatial frequencies, Calibration, Optical coatings, Reflectivity, Space telescopes, Extreme ultraviolet, EUV optics

Showing 5 of 61 publications
Proceedings Volume Editor (2)

SPIE Conference Volume | 1 February 1994

SPIE Conference Volume | 24 March 1982

Conference Committee Involvement (2)
Multilayer and Grazing Incidence X-Ray/EUV Optics II
14 July 1993 | San Diego, CA, United States
High Resolution Soft X-Ray Optics
16 November 1981 | Upton, United States
  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top